Modular multi-directional gas mixing block
TW202630883APending Publication Date: 2026-07-16APPLIED MATERIALS INC
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Patent Information
- Authority / Receiving Office
- TW · TW
- Patent Type
- Applications
- Current Assignee / Owner
- APPLIED MATERIALS INC
- Filing Date
- 2025-09-26
- Publication Date
- 2026-07-16
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Abstract
Exemplary modular gas blocks may include a body having an inlet end and an outlet end. The body may define a first fluid channel extending along a length and may define a second fluid channel extending along a width. The inlet end may define a fluid inlet that is coupled with the first fluid channel. The outlet end may define a first fluid outlet that is coupled with the first fluid channel. An upper surface of the body may define a first fluid port that is coupled with the fluid inlet via the first fluid channel. The upper surface of the body may define a second fluid port that is coupled with the second fluid channel. The body may define a third fluid port that is coupled with the second fluid port via the second fluid channel.
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