An electrostatic chuck with a light heating structure
TW202630898APending Publication Date: 2026-07-16VM INC
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Patent Information
- Authority / Receiving Office
- TW · TW
- Patent Type
- Applications
- Current Assignee / Owner
- VM INC
- Filing Date
- 2025-10-21
- Publication Date
- 2026-07-16
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Abstract
The present invention relates to an electrostatic chuck with a photothermal structure. The electrostatic chuck with a photothermal structure includes: a main body block (11); a dielectric layer (12) bonded to the upper surface of the main body block (11); a heater (13) for heating the dielectric layer; and a light emitting module (14) for guiding light to the lower surface of the dielectric layer (12) to heat the dielectric layer (12).
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