Electrostatic chuck with multi-splat dielectric coating applied to base plate

Abstract

An electrostatic chuck comprises a base plate and a dielectric coating. The base plate has a shoulder portion configured to support an edge ring. Applied to at least the shoulder portion of the base plate, the dielectric coating comprises a locally laminar composite structure of a plurality of splats of a first splat composition interspersed among a plurality of splats of a second splat composition. The first splat composition has natively a higher dielectric constant and a lower thermal conductivity than the second splat composition.

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