Substrate transport method, substrate transport apparatus and substrate processing method

Abstract

A technology is provided that, in a substrate handling technique for transporting a substrate while maintaining its buoyancy at the periphery, and in a substrate processing technique for supplying a processing liquid to the upper surface while transporting the substrate using the substrate handling technique, can handle a plurality of substrates with different dimensions in the transport direction. Depending on whether the substrate being transported onto the buoyancy stage is a first substrate or a second substrate, the relative relationship between the substrate's loading position and the holding position provided by the holding part changes. Therefore, in the substrate handling unit, the relationship between the loading position and the holding position provided by the holding part is adjusted for both the first and second substrates. This allows the position of the holding part to be adapted for substrates with different lengths in the transport direction, ensuring that the substrate being transported onto the buoyancy stage is reliably held by the holding part. As a result, it eliminates the need to redesign and manufacture the substrate handling unit.

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