Chuck for die level testing and level testing equipment including same
TW202630906APending Publication Date: 2026-07-16SEMICS INC
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Patent Information
- Application Number
- TW114150168
- Authority / Receiving Office
- TW · TW
- Patent Type
- Applications
- Current Assignee / Owner
- Priority Date
- 2025-06-30
- Filing Date
- 2025-12-19
- Publication Date
- 2026-07-16
Abstract
A chuck for grain level testing may include: a movable chuck supporting a plurality of grains, and a chuck base disposed below the movable chuck, wherein the movable chuck includes: a plate defining a plurality of vacuum adsorption holes, and partitions disposed on the upper surface of the plate, surrounding at least one or more vacuum adsorption holes when viewed in a plane.
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