Reactor system

Abstract

A reactor system can comprise a substrate carrier, which can be configured to move a substrate within the reactor system, and / or a translating arm; a temperature measurement device; a processor; and / or a tangible, non-transitory memory configured to communicate with the processor having instructions stored thereon that, in response to execution by the processor, cause the processor to perform operations. The temperature measurement device can be coupled to the substrate carrier and / or translating arm, and / or the temperature measurement device can be coupled another component of the reactor system. The temperature measurement device can be configured to measure a temperature of a processed substrate within the reaction system. The processor can perform operations including measuring the temperature of the substrate; and / or comparing the measured temperature with a reference temperature.