Degassing apparatus and substrate processing apparatus equipped with the same, as well as degassing method and liquid supply method

Abstract

The degassing apparatus 6a of the present invention includes: a tank 11 for storing the liquid to be degassed; a circulation pipe 19 connected at one end to the outlet 106 of the tank 11 and at the other end to the inlet 105 of the tank 11; a pump 15 disposed in the circulation pipe 19 for drawing liquid from the tank 11 and outputting it; and a foamer 13 disposed in the circulation pipe 19 for generating bubbles from the liquid by allowing the liquid to flow through a narrowed section of the flow path cross-section; and degassing the liquid stored in the tank 11 is performed by circulating the liquid between the tank 11 and the foamer 13.