Information processing methods, computer programs and information processing devices

Abstract

[Problem] To provide an information processing method, computer program, and information processing apparatus that can support users in performing analysis related to the spraying of chemicals in a substrate processing apparatus. [Solution] According to the information processing method of this embodiment, the information processing apparatus acquires recorded data related to the spraying of chemicals in a plurality of components of a substrate processing apparatus, and outputs a chart classifying the acquired recorded data by period and component. This chart may show the correspondence between combinations of periods and components and the amount or number of sprays of chemicals; the information processing apparatus may output the chart showing details of the chemical spraying content for each combination of periods and components.

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