Annealing apparatus and method for operating the annealing apparatus

Abstract

An annealing apparatus includes a chamber, a base disposed in the chamber for supporting a substrate, a heating set that includes at least a first subset and a second subset each subset configured to correspond to different parts of the substrate, and a power supply and control module that activates the first subset thereby switching the first subset to an activated state and heat the corresponding parts of the substrate, deactivates the first subset, activates the second subset thereby switching the second subset to the activated state and heat the corresponding parts, and deactivates the second subset.