Colorless, particle-free, aminosilane-containing wet etch formulations

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The inclusion of a lanthanide compound in etchant compositions addresses the discoloration issue by scavenging reactive species, maintaining the composition's colorlessness and stability, thus enhancing the etchant's performance in wet etching.

TW202631509APending Publication Date: 2026-08-01ENTEGRIS INC

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Patent Information

Application Number: TW114147208
Authority / Receiving Office: TW · TW
Patent Type: Applications
Current Assignee / Owner
Priority Date: 2024-12-03
Filing Date: 2025-12-03
Publication Date: 2026-08-01

Application Information

Patent Timeline

03 Dec 2024

Priority

03 Dec 2025

Application

TW114147208

01 Aug 2026

Publication

TW202631509A

IPC: C01F17/224; C07C211/00; C08K3/014; C09K13/04; C23F1/24

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Application Domain

Organic chemistry Lanthanide oxides/hydroxides

Technology Topics

O-Phosphoric Acid Physical chemistry

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AI Technical Summary

Technical Problem

Amine compounds in etching formulations can oxidize during storage and use, leading to discoloration due to heat or photochemical processes, which affects the composition's stability and performance.

Method used

Incorporating a lanthanide compound in its highest oxidation state as a decolorizing agent in the etchant composition to scavenge reactive oxygen species and organic free radicals formed during thermal or photochemical amine oxidation, thereby maintaining the composition's colorlessness and reducing oxidation byproducts.

Benefits of technology

The etchant composition remains colorless and stable, with reduced turbidity and oxidation byproducts, even after aging, ensuring consistent performance in wet etching processes.

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Abstract

Colorless etchant compositions and method of obtaining colorless etchant compositions are provided. Etchant compositions may comprise a phosphoric acid, an amine-containing compound, and a light absorbing compound. The light absorbing compound is a reaction product of the phosphoric acid and a decolorizing agent. The decolorizing agent may comprise a lanthanide compound in its highest oxidation state and have strong scavenging properties of reactive oxygen species or organic radicals formed during thermally or photochemically induced amine oxidation.

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