Electroless ruthenium plating bath
The electroless ruthenium plating bath with hydrazine and hydroxylamine compounds addresses precipitation and stability issues, resulting in a stable and low-oxygen ruthenium coating.
TW202632071APending Publication Date: 2026-08-01C UYEMURA & CO LTD
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Patent Information
- Application Number
- TW114136033
- Authority / Receiving Office
- TW · TW
- Patent Type
- Applications
- Current Assignee / Owner
- Priority Date
- 2024-09-24
- Filing Date
- 2025-09-19
- Publication Date
- 2026-08-01
AI Technical Summary
Technical Problem
Existing electroless ruthenium plating baths face issues with ruthenium precipitation in multiple valence states, leading to insufficient deposition and bath decomposition, and amine borane compounds result in coatings with high impurity oxygen content causing shrinkage during annealing.
Method used
An electroless ruthenium plating bath using hydrazine as a reducing agent and hydroxylamine compounds and organic compounds with hydroxyl groups as stabilizers to improve stability and suppress coating shrinkage.
Benefits of technology
The solution achieves a ruthenium coating with low impurity oxygen content and enhanced precipitation properties, maintaining bath stability and preventing coating shrinkage during annealing.
✦ Generated by Eureka AI based on patent content.
Abstract
The object of the present invention is to provide an electroless ruthenium plating bath that uses a hydrazine as a reducing agent, and that can improve bath stability, has excellent ruthenium deposition properties, and can suppress film shrinkage during annealing treatment. The electroless ruthenium plating bath comprises at least a ruthenium compound, a reducing agent, and a stabilizer, wherein the reducing agent is a hydrazine, the stabilizer comprises a hydroxylamine compound and an organic compound having a hydroxyl group, the hydroxylamine compound is at least one of hydroxylamine sulfate and hydroxylamine chloride, and the organic compound having a hydroxyl group is at least one selected from the group consisting of gluconolactone, sorbitol, mannitol, and citric acid monohydrate.
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