Substrate processing system and substrate processing apparatus
The integration of a flexural member and power generation element in substrate processing systems addresses power inefficiencies by generating electricity from pressure variations, improving overall system efficiency.
TW202633322APending Publication Date: 2026-08-01TOKYO ELECTRON LTD
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Patent Information
- Application Number
- TW114128879
- Authority / Receiving Office
- TW · TW
- Patent Type
- Applications
- Current Assignee / Owner
- Priority Date
- 2025-07-25
- Filing Date
- 2025-07-30
- Publication Date
- 2026-08-01
AI Technical Summary
Technical Problem
Substrate processing systems consume a significant amount of power, necessitating improvements in power efficiency.
Method used
Incorporation of a flexural member that flexes due to pressure variations, coupled with a power generation element to generate electricity, within the substrate processing system.
Benefits of technology
Enhances power efficiency by harnessing pressure fluctuations to generate electricity, thereby reducing overall power consumption.
✦ Generated by Eureka AI based on patent content.
Abstract
This invention provides a technique for improving power efficiency in a substrate processing system. The substrate processing system includes: a flexural member configured to flex due to pressure variations; and a power generation element mounted on the flexural member and configured to generate electricity by means of the flexural member's flexure.
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