Loading port, storage container and side base plate support

Abstract

A loading port, a storage container, and a side substrate support are provided. The loading port (L1) is capable of moving the stored item (W) out of the storage container (1) and into the storage container (1) relative to the storage container (1) which can hold the stored item (W). The stored item is a substrate (W) or a substrate support device that supports the substrate. The loading port (L1) is equipped with a mapping arm (L30) for detecting whether there is a stored item (W) in the storage container (1). The mapping arm (L30) is equipped with a shape detection unit (L322) for detecting the internal shape of the storage container (1). The shape detection unit is equipped with a sensor (L322) for detecting the shape of the side substrate support (5) or the shape of the inner wall of the container body (1). It detects one or both of the paired side substrate supports (5) in the substrate storage space (27).

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