Stage for die placement

TW202633755APending Publication Date: 2026-08-16ASML NETHERLANDS BV
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Patent Information

Application Number
TW114135822
Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
Priority Date
2025-02-10
Filing Date
2025-09-18
Publication Date
2026-08-16

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Abstract

A stage for die placement comprises a support member; a movable member that is movable relative to the support member, wherein the movable member is configured to hold at least one die; and an actuator configured, on actuation, to move the movable member relative to the support member in six degrees of freedom.
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