Machining System
TW202633824APending Publication Date: 2026-08-16NIKON CORP
View PDF 0 Cites 0 Cited by
Patent Information
- Application Number
- TW115101554
- Authority / Receiving Office
- TW · TW
- Patent Type
- Applications
- Current Assignee / Owner
- Priority Date
- 2025-02-04
- Filing Date
- 2026-01-15
- Publication Date
- 2026-08-16
Smart Images
Figure 00000000_0000_ABST
Abstract
A processing system, wherein a body (10) includes: at least one of a loading inlet (18) and a loading outlet (19) for a substrate (P); one or more rollers (60) for conveying the substrate (P); a processing apparatus (50) for processing the substrate (P); and an applicator (81) for applying a force to the body (10) such that the force generates a torque in the opposite direction to the torque generated by the force applied to one or more rollers (60) during conveying the substrate (P).
Need to check novelty before this filing date? Find Prior Art