Pure water production equipment

Abstract

In the ultrapure water production system 1, one or more water treatment devices made of canisters have their inner walls lined with a resin containing urea bonds. The water treatment devices made of canisters in the pretreatment unit 2, primary pure water unit (pure water production unit) 3, and secondary pure water production unit (subsystem) 4 of the ultrapure water production system 1 include, for example, activated carbon towers, filters, decarbonation towers, ion exchange resin towers, and chelating resin towers. Ion exchange resin towers or chelating resin towers using high-concentration regeneration chemicals such as acids or alkalis are particularly suitable. Ion exchange resin towers include, for example, cation exchange resin towers, anion exchange resin towers, and mixed-bed ion exchange resin towers. With such a pure water production apparatus, the risk of water quality deterioration and particulate matter generation due to degradation of water treatment equipment made of canisters during long-term use can be reduced.

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