Novel surface treatment agent, silica sol and photosensitive resin composition

Abstract

The objective of this invention is to provide a surface treatment agent with optimal solubility in alkaline developing solutions for use in electronic devices, a silica particle having alkali-soluble sites introduced onto the surface of silica particles by means of the surface treatment agent, an organosol, and a photosensitive resin composition containing the silica particles. The means to solve this objective is a photosensitive resin composition containing the following (A), (B), (C), and (D) components and capable of thermosetting. (A) Component: Silica particles with a particle size of 1 nm to 1 μm, surface-modified with an alkali-developable alkoxysilane compound represented by formula (1); (B) Component: Alkali-soluble resin; (C) Solvent; (D) Component: Photosensitive agent. (In the formula, R1 represents a hydrogen atom or an alkyl group having 1 to 4 carbon atoms; one of R2, R3, and R4 represents a monovalent group having an alkoxysilyl group; the remaining two independently represent a hydrogen atom, an alkyl group having 1 to 16 carbon atoms, a branched alkyl group having 3 to 16 carbon atoms, a cycloalkyl group having 3 to 8 carbon atoms, a phenyl group, a benzyl group, a phenethyl group, a phenylsulfonyl group, a methyl(acryloyloxy)ethyl group, or a methyl(acryloyloxy)propyl group. The alkyl group and the branched alkyl group may also be substituted with halogen atoms.) Furthermore, the alkyl group and branched alkyl groups can also be substituted with a urea group, which can be substituted with one or more groups selected from a monovalent group having an ester site, an alkyl group having a urea site substituted with a monovalent group having an ester site, a phenyl group having a urea site substituted with a monovalent group having an ester site, phenyl, and alkyl. The phenyl, benzyl, phenethyl, and phenylsulfonyl groups defined above can also be substituted with groups selected from alkyl, alkoxy, halogen, nitro, and cyano groups. L represents an alkyl group or phenyl group having 1 to 4 carbon atoms.

Images