Method for manufacturing titanium target

TW202634094AInactive Publication Date: 2026-08-16CHINA STEEL
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Patent Information

Application Number
TW114104712
Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
Filing Date
2025-02-08
Publication Date
2026-08-16
Estimated Expiration
Not applicable · inactive patent

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Abstract

A method for manufacturing titanium target is disclosed. In the method, a titanium plate is manufactured. The titanium plate includes a front surface and a backside surface. The backside surface has plural first grooves and plural second grooves, and the first grooves intersect the second grooves. A metal foil is put on the backside surface of the titanium plate. A metal plate is put on the metal foil. A diffusion bonding operation is performed to deform the metal foil to fill the first grooves and the second grooves, such that the metal plate and the titanium plate are combined through the metal foil.
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