apparatus for manufacturing laminates and method for forming self-organizing monolayers

Abstract

This invention provides a laminate manufacturing apparatus capable of forming high-density self-organizing monolayers on a substrate surface. The laminate manufacturing apparatus 1 of this invention includes: a vacuum chamber 2 housing a substrate; a gas inlet 10 for introducing gas into the vacuum chamber; and plasma generation units 3 and 4 forming a plasma environment within the vacuum chamber. The laminate manufacturing apparatus 1 has the following modes: a surface hydrophilization mode, in which an evaporation source imparting hydrophilic groups is supplied to the vacuum chamber, and the film-forming surface of the substrate is modified by the plasma environment formed by the plasma generation units, thereby hydrophilizing the film-forming surface; and a self-organizing mode, in which an evaporation source for a self-organizing monolayer precursor material is supplied to the hydrophilized substrate in a vacuum chamber, and an evaporation source for promoting the hydrolysis of a self-organizing monolayer precursor material is supplied, thereby forming a self-organizing monolayer on the hydrophilized film-forming surface.

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