Tool for repairing sealing elements

Abstract

A tool for repairing sealing elements includes a ring and at least one fastening assembly. The ring holds a sealing element in a support portion. The fastening assembly includes a fastener and a magnet. The fastener is pivotally mounted on the ring and pivots between an open position and a fastened position. The magnet is located on the fastener or the ring to hold the element in the fastened position by magnetic attraction, causing the fastening portion of the fastener to abut against the sealing element, thereby positioning the sealing element in the support portion. The magnetic attraction of the fastener allows for quick assembly and disassembly, and the ring increases the overall structural rigidity of the sealing element, making it less prone to deformation under pressure during repair.

Description

Technical Field

[0001] This invention belongs to the technical field of fixtures, and in particular refers to a fixture for repairing sealing elements. Prior Technology

[0002] Note that electroplating is a common technique in the manufacture of integrated circuits (ICs) to deposit one or more layers of conductive metal onto a semiconductor substrate. During the operation of the electroplating equipment, the semiconductor substrate must be immersed in the electroplating bath, so that at least the electroplated surface of the substrate is exposed to the electrolyte. To prevent electrolyte leakage and to prevent the electrolyte from contacting components of the electroplating equipment other than the surface of the substrate designated for electroplating, a sealing element, as shown in Figure 8, is often used to support the semiconductor substrate.

[0003] The sealing element 3 has a conductive ring 31 made of metal. A plurality of connecting rods 33 protrude from the upper surface of the conductive ring 31. An elastic lip seal 32 extends radially inward from the conductive ring 31 to support the bottom surface of the semiconductor substrate and seal the semiconductor substrate within the sealing element 3. The elastic lip seal 32 is mainly composed of a fluoroelastomer (FKM) or a perfluoroelastomer (FFKM).

[0004] During production, a fluorinated or perfluoroelastomer is placed inside a mold, and then pressure is applied to the conductive ring within the mold to bond the conductive ring with the fluorinated or perfluoroelastomer. Because the elastomer often needs to be placed in slightly excess to ensure complete coverage of the conductive ring 31 during compression molding, the elastomer may be squeezed out from the gap between the conductive ring and the mold during pressure bonding, resulting in irregular edges on the finished sealing element that require a finishing process.

[0005] Currently, the finishing of sealing elements is mainly done by the operator holding the element by hand and using a blade to remove excess elastomer. However, the gripping force varies from operator to operator, posing a risk of deformation of the conductive ring 31 of the sealing element due to compression, affecting the sealing effect. Furthermore, the finishing position cannot be restricted, and the amount removed during cutting is difficult to control, leading to over-cutting or incomplete cutting, resulting in an increase in defective products. Users often only discover that the sealing element may be deformed and unable to meet sealing requirements during testing, requiring disassembly and replacement, increasing production time and reducing production efficiency.

[0006] Therefore, how to solve the above-mentioned problems is the primary issue that this invention aims to address. Summary of the Invention

[0007] The main objective of this invention is to provide a tool for repairing sealing elements, which uses at least one snap-fit ​​assembly to magnetically fix the sealing element to the support portion of a ring body. The ring body increases the overall rigidity of the sealing element, protects the sealing element, and guides the removal position, making it convenient for the processor to repair excess elastic material and avoid over-removal.

[0008] To achieve the aforementioned objectives, the present invention provides a tool for repairing sealing elements, comprising:

[0009] A ring body has an upper surface and a lower surface extending along a central axis. The inner peripheral wall of the ring body protrudes towards the central axis to form a support portion for holding a sealing element.

[0010] At least one fastening assembly includes a fastener and a magnet. The fastener has a pivot portion and a clamping portion at opposite ends. The pivot portion is pivotally mounted on the ring body, causing the clamping portion to pivot between an open position and a fastened position. The magnet is located on the fastener or the ring body to maintain the fastener in the fastened position by magnetic attraction, so that the clamping portion faces the support portion and abuts against the sealing element, thereby positioning the sealing element on the support portion.

[0011] To achieve the aforementioned objectives, the present invention also provides a component repair tool, comprising:

[0012] A ring body has an upper surface and a lower surface extending along a central axis. The inner peripheral wall of the ring body protrudes along the central axis to form a support portion for holding a sealing element.

[0013] At least one fastening assembly includes a fastener and a magnet. The fastener has a pivot portion and a clamping portion. The pivot portion is pivotally mounted on the ring body, causing the clamping portion to pivot between an open position and a fastened position. The shape of the clamping portion can correspondingly match the outer contour of the support portion. The magnet is located on the support portion to maintain the fastener in the fastened position by magnetic attraction, so that the clamping portion faces the support portion and abuts against the sealing element, thereby positioning the sealing element on the support portion.

[0014] Preferably, the ring body has at least one pivot seat along its outer peripheral wall, the pivot seat having a pivot interface for the pivot connection portion of the fastener to be pivotally mounted.

[0015] Preferably, the ring body has a chamber at the position corresponding to the fastener. The opening of the chamber is formed on the lower surface of the ring body. The magnet is inserted into the chamber through the opening and the opening is closed by a cover plate to fix the magnet in the ring body. The fastener is made of iron-containing metal material and is held in the fastened state by magnetic attraction when it pivots to the fastening position.

[0016] Preferably, the fastener has a groove for fixing the magnet, and the ring is made of an iron-containing metal. When the fastener is pivoted to the fastening position, the magnet in the groove is located at a position corresponding to the upper surface of the ring.

[0017] Preferably, the fastener has a groove for fixing the magnet; the ring body has a chamber with an opening formed on the lower surface of the ring body. An iron block is placed into the chamber through the opening and the opening is closed by a cover plate to fix the iron block in the ring body. When the fastener pivots to the fastening position, the magnet is positioned corresponding to the position of the iron block.

[0018] Preferably, the clip is protruding on the side of the fastener adjacent to the ring and has a through hole. The clip is also provided with at least one soft cushioning pad. When the clip is in the fastening position, the soft cushioning pad abuts against the upper surface of the sealing element.

[0019] Preferably, the bearing portion is annular, having a support portion and a step portion. The step portion is formed by a recess from one end of the support portion toward the central axis. The support portion also has an annular groove that matches the bottom surface of the sealing element. The sealing element is supported by the support portion and the step portion limits the adjustment range of the sealing element.

[0020] Preferably, the upper surface of the ring is connected to the inner peripheral wall by a guide bevel, which guides and adjusts the sealing element.

[0021] Preferably, the supporting part has a chamber at a position corresponding to the fastener in the fastening position. The chamber has an opening on the side facing the central axis. The magnet is inserted into the chamber through the opening and the opening is closed by a cover plate to fix the magnet in the ring body. The fastener is made of iron-containing metal material and pivots to the fastening position to correspond to the magnet and is maintained in the fastening state by magnetic attraction.

[0022] The aforementioned objectives and advantages of the present invention can be readily understood from the following detailed description of the selected embodiments and the accompanying drawings. Simple Explanation of the Diagram

[0023] Figure 1 is a partial exploded view of the first embodiment of the present invention. Figure 2 is a schematic diagram of the fastener of the present invention in the open position. Figure 3 is a schematic diagram of the fastener of the present invention in the fastening position. Figure 4 is a partial cross-sectional view of the first embodiment of the present invention. Figure 5 is a partial cross-sectional view of the second embodiment of the present invention. Figure 6 is a partial cross-sectional view of the third embodiment of the present invention. Figure 7 is a partial exploded view of the fourth embodiment of the present invention. Figure 8 is a three-dimensional structural diagram of a conventional sealing element of the present invention. Implementation

[0024] As shown in Figures 1 to 4, this is a first embodiment of the sealing element repair tool provided by the present invention, which includes a ring body 1 and at least one fastening assembly 2.

[0025] The ring 1 has an upper surface 11 and a lower surface 12 extending along a central axis Z. The inner peripheral wall 13 of the ring 1 protrudes towards the central axis Z to form a support portion 14 for holding a sealing element 3. As shown in Figure 8, the sealing element 3 is mainly composed of a conductive ring 31 and an elastic material that covers the bottom of the conductive ring 31 to the inner and outer sides of the conductive ring 31. The elastic lip seal 32 protrudes from the bottom surface of the conductive ring 31 towards the inside of the ring.

[0026] Please refer to Figures 1 and 4. In this embodiment, in conjunction with the structure of the sealing element 3, the supporting portion 14 is annular, having a support portion 141 and a stepped portion 142. The stepped portion 142 is formed by a recess from one end of the support portion 141 facing the central axis Z. The conductive ring 31 of the sealing element 3 can be placed on the support portion 141. The supporting portion 14 further has an annular groove 143 that matches the bottom surface of the sealing element 3, ensuring that the sealing element 3 is placed flat on the support portion 141. The portion of the elastic lip seal 32 protruding inward towards the ring is placed on the stepped portion 142, so that the sealing element 3 is supported by the supporting portion 14, which can increase the structural rigidity of the sealing element 3 and prevent the sealing element 3 from being deformed by compression. The upper surface 11 of the ring body 1 is connected to the inner peripheral wall 13 by a guide slope 15. The step 142 and the guide slope 15 restrict and guide the adjustable position of the sealing element 3 to avoid over- or incomplete adjustment.

[0027] The ring body 1 is provided with at least one fastening group 2. In this embodiment, four fastening groups 2 are preferably provided at equal intervals. A pivot seat 17 is provided at the corresponding position of the outer peripheral wall 16 and the fastening groups 2. The pivot seat 17 is locked to the outer peripheral wall 16 by a screw element 4, and a pivot interface 171 is formed by a recess on its top surface. Each of the fastening groups 2 has a fastener 21 and a magnet 22. The fastener 21 has a pivot part 211 and a clamping part 212 at opposite ends. The pivot part 211 is pivotally mounted on the pivot interface 171, and as shown in Figures 2 and 3, it drives the clamping part 212 to pivot between an open position P1 and a fastened position P2. Please refer to Figure 1. The ring body 1 is provided with a chamber 18 at the position corresponding to the fastener 21. The opening of the chamber 18 (not shown in the figure) is formed on the lower surface 12 of the ring body 1. The magnet 22 is inserted into the chamber 18 through the opening and the opening is closed by a cover plate 19 to fix the magnet 22 in the ring body 1.

[0028] Further explanation: In this embodiment, the fasteners 21 are made of ferrous metal, while the ring 1 is made of aluminum metal, and the magnet 22 is preferably a strong magnet. As shown in Figures 2 and 3, when in use, the sealing element 3 is placed on the support portion 14. When the fasteners 21 are pivoted from the open position P1 to the closed position P2, they are held in the closed position P2 by the magnetic attraction of the magnet 22. At this time, as shown in Figure 4, each clamp 212 faces the support portion and abuts against the sealing element 3, thus positioning the sealing element 3 on the support portion, achieving quick assembly and disassembly. During operation, the operator can hold the ring 1 to adjust the sealing element 3; the sealing element 3 is protected by the ring and is not easily deformed by compression.

[0029] Furthermore, as shown in Figures 1, 3, and 4, the clip 212 protrudes from the side of the fastener 21 adjacent to the ring body, and the clip 212 is provided with at least one soft cushioning pad 213. In this embodiment, the clip 212 is symmetrically provided with two soft cushioning pads 213, which are preferably made of rubber. When the clip 212 is in the fastening position P2, the soft cushioning pad 213 abuts against the upper surface of the sealing element 3 to cushion the impact force on the sealing element 3 when the clip 212 pivots to the fastening position P2, thus preventing damage to the sealing element 3 due to the impact. The clip 212 is also provided with a through hole 214, which on the one hand reduces the overall weight of the fastener 21, thereby reducing the impact force on the sealing element 3 during pivoting, and on the other hand allows the connecting rod 33 on the upper surface of the sealing element 3 to extend through to assist in fixing the sealing element 3.

[0030] As shown in Figure 5, this is the second embodiment of the present invention, which differs from the first embodiment in that the fastener 21 has a groove 215 for fixing the magnet 22. In this embodiment, the ring 1 is made of an iron-containing metal, while the fastener 21 is made of an aluminum-containing metal. When the fasteners 21 are pivoted to the fastening position P2, the magnet 22 in the groove 215 is located at a position corresponding to the upper surface 11 of the ring 1. The magnetic attraction between the magnet 22 and the ring 1 keeps the fasteners 21 in the fastening position P2, thereby fixing the sealing element 3 to the support portion 14, achieving the same effect as in the first embodiment.

[0031] As shown in Figure 6, this is the third embodiment of the present invention, which differs from the first embodiment in that: the fastener 21 has a groove 215 for fixing the magnet 22. The ring body 1 has a chamber 18 corresponding to the groove 215. The opening of the chamber 18 (not shown in the figure) is formed on the lower surface 12 of the ring body 1. An iron block 23 is inserted into the chamber 18 through the opening and the opening is closed by a cover plate 19 to fix the iron block 23 inside the ring body 1. When the fastener 21 pivots to the fastening position P2, the magnet 22 is positioned corresponding to the iron block 23. In this embodiment, both the fastener 21 and the ring body 1 are made of aluminum-containing metal, making them lightweight and easy to hold, while achieving the same function of fixing the sealing element 3 as in the first embodiment.

[0032] As shown in Figure 7, this is the fourth embodiment of the present invention, which differs from the first embodiment in that: the ring body 1 has an upper surface 11 and a lower surface 12 extending along the central axis Z; the inner peripheral wall 13 of the ring body 1 protrudes along the central axis Z to form a cylindrical support portion 14 for housing the cylindrical sealing element 3. Four pivot seats 17 protrude outwardly at equal intervals from the outer peripheral wall 16 of the ring body 1, each pivot seat 17 being pivotally connected to the corresponding pivot portion 211 of the fastener 21 by a bolt 5. The shape of the clamping portion 212 of the fastener 21 corresponds to the outer contour of the support portion 14, i.e., it is curved. The supporting part 14 is provided with a chamber 18, which has an opening 181 on the side facing the central axis Z. The magnet 22 is inserted into the chamber through the opening, and the opening 181 is closed by a cover plate 19 to fix the magnet 22 in the ring body 1. In this embodiment, the fastener 21 is made of iron-containing metal, and the ring body 1 is made of aluminum-containing material. When the fastener 21 is pivoted to the fastening position P2 and faces the magnet 22, the fastener 21 is held in the fastening state by the magnetic attraction force of the magnet 22 and abuts against the surface of the sealing element 3 to achieve the effect of fixing the sealing element 3. During trimming, the operator can trim the edge of the sealing element 3 along the top of the supporting part 14. The supporting part 14 and the ring body improve the overall structural rigidity of the sealing element 3, protect the sealing element 3 from compression and deformation, and achieve the effect of precise trimming.

[0033] Based on the above description, the tool for repairing sealing elements provided by the present invention can achieve the following improvements:

[0034] First, it protects the sealing element and provides excellent stability. The sealing element is supported by the ring body and secured by fasteners. Magnetic attraction keeps the fasteners in the engaged position, thus positioning the sealing element on the support and improving the overall structural rigidity of the sealing element. It is less likely to be squeezed and deformed during maintenance.

[0035] Secondly, improve the yield rate; by using the stepped part of the bearing part and the guide slope connecting the upper surface and the inner peripheral wall to limit and guide the trimming position, over-trimming or incomplete trimming is avoided, ensuring that the trimmed sealing element meets the equipment installation requirements, and effectively reducing the defect rate of post-processing.

[0036] Third, quick assembly and disassembly improve processing efficiency; the fastener and the ring are held in the engaged position by magnetic attraction, which clamps the sealing element. Applying a force greater than the magnetic attraction force can swing the fastener to the open position, release the fixation, and remove the sealing element. No additional parts need to be installed for fixation, which can be quickly assembled and disassembled, thus improving processing efficiency.

[0037] However, the above embodiments are only used to illustrate the present invention and are not intended to limit the present invention. Therefore, any changes in numerical values ​​or substitutions of equivalent elements should still fall within the scope of the present invention.

[0038] In conclusion, since this invention can clearly demonstrate to those skilled in the art that it can achieve the aforementioned objectives, it complies with the provisions of the Patent Law, and therefore an application is filed in accordance with the law.

[0039] 1: Ring body 11: Upper surface 12: Lower surface 13: Inner peripheral wall 14: Bearing section 141: Supporting part 142: Steps 143: Annular groove 15: Guide sloping surface 16: Peripheral wall 17: Pivot 171: Pivot Interface 18: Refrigeration Room 181: Opening 19: Cover plate 2: Buckle Group 21: Fasteners 211: Pivot section 212: Clip section 213: Soft cushioning pad 214: Elongated hole 215: Container 22: Magnet 23: Iron block 3: Sealing elements 31: Conductive ring 32: Elastic lip seal 33: Connecting pole 4: Screw fasteners 5: Bolts Z: Central axis P1: Open position P2: Fastening position

Claims

1. A tool for repairing sealing elements, comprising: a ring having an upper surface and a lower surface extending along a central axis, the inner peripheral wall of the ring protruding toward the central axis to form a support portion for holding a sealing element; at least one fastening assembly including a fastener and a magnet, the fastener having a pivot portion and a clamping portion at opposite ends, the pivot portion being pivotally disposed on the ring, causing the clamping portion to pivot between an open position and a fastened position, the magnet being disposed on the fastener or the ring to maintain the fastener in the fastened position by magnetic attraction, the clamping portion facing the support portion and abutting against the sealing element, thereby positioning the sealing element on the support portion.

2. A tool for repairing sealing elements, comprising: a ring having an upper surface and a lower surface extending along a central axis, the inner peripheral wall of the ring protruding along the central axis to form a support portion for holding a sealing element; at least one fastening assembly including a fastener and a magnet, the fastener having a pivot portion and a clamping portion, the pivot portion being pivotally disposed on the ring, driving the clamping portion to pivot between an open position and a fastened position, the shape of the clamping portion correspondingly matching the outer contour of the support portion, the magnet being disposed on the support portion to hold the fastener in the fastened position by magnetic attraction, the clamping portion facing the support portion and abutting against the sealing element, thereby positioning the sealing element on the support portion.

3. The tool for repairing sealing elements as described in claim 1 or claim 2, wherein, The ring body has at least one pivot seat along its outer peripheral wall, and the pivot seat has a pivot interface for the pivot connection of the fastener to be pivotally mounted.

4. The tool for repairing sealing elements as described in claim 1, wherein, The ring body has a chamber corresponding to the fastener. The opening of the chamber is formed on the lower surface of the ring body. The magnet is inserted into the chamber through the opening and the opening is closed by a cover plate to fix the magnet in the ring body. The fastener is made of iron-containing metal material and is held in the fastened state by magnetic attraction when it is pivoted to the fastening position.

5. The tool for repairing sealing elements as described in claim 1, wherein, The fastener has a groove for fixing the magnet, and the ring is made of iron-containing metal. When the fastener is pivoted to the fastening position, the magnet in the groove is located at a position corresponding to the upper surface of the ring.

6. The tool for repairing sealing elements as described in claim 1, wherein, The fastener has a groove for fixing the magnet; the ring has a chamber with an opening formed on the lower surface of the ring. An iron block is placed into the chamber through the opening and the opening is closed by a cover plate to fix the iron block in the ring. When the fastener pivots to the fastening position, the magnet is positioned at the position corresponding to the iron block.

7. The tool for repairing sealing elements as described in claim 1, wherein, The clip is protruding on the side of the fastener adjacent to the ring and has a through hole. The clip is also provided with at least one soft cushioning pad. When the clip is in the fastening position, the soft cushioning pad abuts against the upper surface of the sealing element.

8. The tool for repairing sealing elements as described in claim 1, wherein, The support portion is annular, having a support portion and a step portion. The step portion is formed by a recess from one end of the support portion toward the central axis. The support portion also has an annular groove that matches the bottom surface of the sealing element. The sealing element is supported by the support portion and the step portion limits the adjustment range of the sealing element.

9. The tool for repairing sealing elements as described in claim 1, wherein, The upper surface of the ring is connected to the inner peripheral wall by a guide bevel, which guides and adjusts the sealing element.

10. The tool for repairing sealing elements as described in claim 2, wherein, The supporting part has a chamber with an opening on the side facing the central axis. The magnet is inserted into the chamber through the opening and the opening is closed by a cover plate to fix the magnet in the ring body. The fastener is made of iron-containing metal and pivots to the fastening position to correspond with the magnet and is held in the fastening state by magnetic attraction.

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