Method for regeneration of a cryopump system
TW202634167APending Publication Date: 2026-08-16EDWARDS VACUUM LLC
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Patent Information
- Application Number
- TW114140108
- Authority / Receiving Office
- TW · TW
- Patent Type
- Applications
- Current Assignee / Owner
- Priority Date
- 2024-10-24
- Filing Date
- 2025-10-17
- Publication Date
- 2026-08-16
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Figure TWG2TA001072775_001 
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Abstract
Method for regeneration of a cryopump system comprising at least two cryopumps connected to a common roughing pump. The method includes evacuating, by the roughing pump, one or more first cryopumps of the cryopump system for a first duration while maintaining the pressure in one or more second cryopumps of the cryopump system. The first duration is determined in dependence on the pressure measured in the one or more first cryopumps at the beginning of the evacuation of the one or more first cryopumps.
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