Aerosol dryer and detection system for particles in liquid

Abstract

An aerosol dryer and detection system for particles in liquid. The aerosol dryer includes a chamber, a tube, and a radiant heater. The chamber has an inner space, a first opening, and a second opening. The first opening and the second opening penetrate through the chamber and communicate with the inner space. The tube includes an inlet portion, a heating portion, and an outlet portion connected in sequence. The inlet portion is located at the first opening of the chamber, the outlet portion is located at the second opening of the chamber, the heating portion is disposed in the inner space of the chamber. The radiant heater is disposed in the inner space of the chamber and includes a heating surface facing the heating portion of the tube. The tube receives an aerosol from the inlet portion, the radiant heater emits radiated heat to heat the aerosol in the heating portion. The aerosol is dried and discharged from the outlet portion.

Description

[Technical Field]

[0001] This application relates to a dryer, and more particularly to a dryer for drying aerosols. [Previous Technology]

[0002] In manufacturing processes across various fields, different solutions are frequently used. In the semiconductor industry, various chemical solutions are commonly used in the manufacturing process. As semiconductor precision has advanced to the nanometer level, each step in the process significantly impacts the yield. To ensure yield, the quality requirements of the chemical solutions used in the process must be strictly controlled. Therefore, to ensure the quality (e.g., cleanliness) of the chemical solutions used in the process, the chemicals used must be tested regularly.

[0003] Semiconductor manufacturing processes involve various chemical or physical treatments to form tiny integrated circuits or perform surface treatments on a substrate.

[0004] In terms of surface treatment, there are many surface treatment methods that use liquid chemical reagents to coat, plate, or modify the surface of an article. The surface treatment method can be selected from spin coating, spray coating, dip coating, physical vapor deposition (PVD), chemical vapor deposition (CVD), atomic layer deposition (ALD), sol-gel deposition, electroplating, roll-to-roll deposition, and aerosol deposition.

[0005] With the evolution of nanoscale processes, for example, for semiconductor devices with a linewidth of 12 nanometers, particles as small as approximately 6 nanometers can cause defects. To improve product yield, factors that may generate particles during the manufacturing process need to be precisely controlled. For surface treatment methods using aerosols, an aerosol is a gaseous dispersion system composed of solid or liquid particles suspended in a gaseous medium. To detect particles in an aerosol, it is necessary to heat and dry the aerosol for detection. Therefore, an aerosol dryer must be provided. [Summary of the Invention]

[0006] To address the aforementioned problems, this application provides an aerosol dryer, including a cavity, a pipe, and a radiant heat source. The cavity has an internal space, a first opening, and a second opening, which penetrate the cavity and communicate with the internal space. The pipe includes an inlet end, a heating section, and an outlet end connected in sequence. The inlet end is located at the first opening of the cavity, the outlet end is located at the second opening of the cavity, and the heating section is located within the internal space of the cavity. The radiant heat source is disposed within the internal space of the cavity and includes a heating surface facing the heating section of the pipe. The pipe receives aerosol from the inlet end, the radiant heat source emits radiant heat to heat the aerosol within the heating section, and the dried aerosol is output from the outlet end.

[0007] In some embodiments, the aerosol dryer further includes an insulation layer disposed on the inner surface of the cavity and surrounding the radiant heat source and pipes.

[0008] In some embodiments, the heating section of the aforementioned pipe fitting includes a first heating section, a U-shaped heating section and a second heating section; one end of the first heating section is connected to the inlet end and the other end is connected to the U-shaped heating section; one end of the second heating section is connected to the outlet end and the other end is connected to the U-shaped heating section; the first heating section is located above the second heating section along the direction of gravity.

[0009] In some embodiments, the aerosol dryer further includes a temperature sensor disposed at the center of the first heating section in the length direction.

[0010] In some embodiments, the aforementioned radiative heat source is an infrared heat source.

[0011] In some embodiments, the aforementioned radiant heat source includes a surface layer and a heating element, wherein the surface layer covers the heating element and the heating surface is located on the surface layer.

[0012] In some embodiments, the aforementioned fittings are made of a light-transmitting material.

[0013] In some embodiments, the aforementioned fittings are made of quartz.

[0014] In some embodiments, the aerosol dryer further includes a closed housing, a housing cavity, tubing and a radiant heat source.

[0015] This application further provides a liquid particle detection system, comprising a test liquid tank, an atomizer, the aforementioned aerosol dryer, an electrostatic neutralization chamber, a particle separator, a counter, and a controller. The test liquid tank stores the test liquid. The atomizer is connected to the test liquid tank. The aerosol dryer is connected to the atomizer. The electrostatic neutralization chamber is connected to the aerosol dryer. The particle separator is connected to the electrostatic neutralization chamber. The counter is connected to the particle separator. The controller is electrically connected to the atomizer, the aerosol dryer, the electrostatic neutralization chamber, the particle separator, and the counter. The controller controls the atomizer to atomize the test liquid into an aerosol and controls the aerosol dryer to heat and dry the aerosol; the controller controls the electrostatic neutralization chamber to electrostatically neutralize the aerosol; the controller controls the particle separator to generate a flow field and apply an electric field to the aerosol, thereby separating multiple particles in the aerosol according to their particle size; the controller controls the counter to amplify and concentrate the separated particles, calculate the number of particles, and output the counting information.

Implementation Method

[0016] Before this application is described in detail in various embodiments, please note that in the following description, the drawings of this application are only for illustration and are not necessarily drawn to scale, and not all details are necessarily presented in the drawings.

[0017] The directional terms or similar terms used in this case, such as "front," "rear," "left," "right," "top," "bottom," "inner," "outer," and "side," are mainly for reference to the directions in the accompanying drawings. These directional terms or similar terms are only used to assist in explaining and understanding the various embodiments of this invention and are not intended to limit this invention. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Therefore, features defined with "first," "second," etc., may explicitly or implicitly include one or more of that feature.

[0018] The use of the quantifiers “one” or “a” for the elements and components described in this case is for convenience of use and to provide the general meaning of the scope of this work; in this work, it should be interpreted as including one or at least one, and the single concept also includes the plural case, unless it clearly means otherwise.

[0019] Referring to Figures 1 to 3, Figure 1 is a three-dimensional external view of one embodiment of the aerosol dryer of this application; Figure 2 is a schematic diagram of the cavity separated from the closed shell of one embodiment of the aerosol dryer of this application; Figure 3 is an exploded schematic diagram of the cavity of one embodiment of the aerosol dryer of this application. The aerosol dryer H includes a cavity 10, a pipe 20, and a radiant heat source 30. The aerosol is dried by being heated by the radiant heat source 30 within the cavity 10 through the pipe 20 and then output. Aerosol (also known as air suspension colloid, aerogel, or smoke substance) refers to a dispersion system formed when solid or liquid particles are stably suspended in a gaseous medium. The particulate matter is called suspended particles, and their particle size is mostly between 0.01 and 10 micrometers.

[0020] Generally speaking, heating methods are divided into three types: heat conduction, heat convection, and heat radiation. Heat is transferred from the heating element to the carrier through contact heat conduction, and the carrier's temperature rises as a result. This is called heat conduction, such as in electric cookers and electric kettles. After the heating element heats up, the temperature inside the heating chamber rises through air convection, which dissipates heat and achieves the heating effect. This is called heat convection, such as in ovens or high-temperature furnaces. As for the method of heating an object by irradiation with infrared rays, where the heating element and the heated object do not need to be in direct contact or require air convection, this is called heat radiation.

[0021] In this regard, based on the characteristics of aerosols being suspended and easily diffused, this application delivers the aerosol into a non-open pipe 20 that does not directly contact the radiant heat source 30. The aerosol is confined within the pipe 20 and does not enter the internal space 13 of the cavity 10. The aerosol in the pipe 20 is heated and dried by the radiant heat source 30 through thermal radiation, ensuring that the aerosol can be reliably heated and dried and that no loss occurs during the heating and drying process.

[0022] Referring to Figures 1 to 3 and Figures 4 to 6, Figure 4 is a cross-sectional view drawn along section line 4-4 in Figure 1; Figure 5 is a cross-sectional view drawn along section line 5-5 in Figure 1; and Figure 6 is a cross-sectional view drawn along section line 6-6 in Figure 1. The cavity 10 has an internal space 13, a first opening 121, and a second opening 122. The first opening 121 and the second opening 122 penetrate the cavity 10 and respectively connect to the internal space 13. The pipe fitting 20 includes an inlet end 21, a heating part 22, and an outlet end 23 connected in sequence. The inlet end 21 is located at the first opening 121 of the cavity 10, the outlet end 23 is located at the second opening 122 of the cavity 10, and the heating part 22 is located within the internal space 13 of the cavity 10. A radiant heat source 30 is disposed within the internal space 13 of the cavity 10; the radiant heat source 30 includes a heating surface 311 facing the heating part 22 of the pipe fitting 20. The fitting 20 receives aerosol from the inlet end 21, and the radiant heat source 30 emits radiant heat to heat the aerosol in the heating section 22. After the aerosol is dried, it is output from the outlet end 23.

[0023] In this way, the aerosol is heated and dried by the radiant heat source 30 during the process of passing through the pipe 20, so as to facilitate the subsequent detection of the particle size and particle number of solid particles.

[0024] Referring to Figures 3 to 6, the cavity 10 is a hollow structure used to provide space for housing the radiant heat source 30 and heating the aerosol. In some embodiments, the cavity 10 is a long rectangular hollow body. In these embodiments, the cavity 10 includes four sides 11 and two end faces 12. The four sides 11 are connected to each other perpendicularly in sequence and are opposite to each other in pairs. The two end faces 12 are disposed at both ends of each side 11. Here, the direction perpendicular to the two end faces 12 is the length direction D1, and the direction perpendicular to the two opposite sides 11 is the width direction D2. The cavity 10 has a length in the length direction D1 and a width in the width direction D2. In some embodiments, the length is greater than the width, but this is not a limitation thereof.

[0025] Referring to Figures 3 to 6, the side faces 11 and end faces 12 of the cavity 10 define the internal space 13. The first opening 121 and the second opening 122 are configured according to the shape or position of the pipe 20. That is, the first opening 121 and the second opening 122 may be provided on one or both of the side faces 11 and the end faces 12. In some embodiments, a portion of the pipe 20 is located within the internal space 13, a portion of the pipe 20 is located at or extends out of the cavity 10 through the first opening 121, and a portion is located at or extends out of the cavity 10 through the second opening 122. Here, the portion of the pipe 20 located within the internal space 13 is the heating part 22, the portion of the pipe 20 located at or extending out of the cavity 10 through the first opening 121 is the inlet end 21, and the portion of the pipe 20 located at or extending out of the cavity 10 through the second opening 122 is the outlet end 23.

[0026] It is worth noting that the shape and length of the pipe fitting 20 or the shape of the cavity 10 can be determined by various influencing factors. For example, when the appearance / space of the cavity 10 is limited, under the constraint that the cavity 10 is long and narrow, the pipe fitting 20 can be changed into a straight pipe shape to adapt to the internal space 13 of the cavity 10 (as shown in Figure 7). Under the constraint that the cavity 10 is wide, the pipe fitting 20 can be changed into a single bend or a meandering shape with multiple bends in a part of the internal space 13 to shorten the appearance length.

[0027] When the appearance of the fitting 20 is limited, the cavity 10 can also change its appearance to correspond to the shape of the fitting 20. In addition, the shapes of the cavity 10 and the fitting 20 can also be changed according to the output aerosol temperature. For example, when the required aerosol output temperature is high, the length of the fitting 20 can be increased to prolong the time for the radiant heat source 30 to heat the aerosol inside the fitting 20, so as to meet the required aerosol output temperature.

[0028] Referring to Figure 7, in some embodiments, the pipe 20 is a straight pipe, wherein the inlet end 21, the heating part 22, and the outlet end 23 of the pipe 20 are all straight. In these embodiments, the first opening 121 of the cavity 10 is provided on one end face 12, and the second opening 122 is provided on the other end face 12. Thus, the inlet end 21 and the outlet end 23 of the pipe 20 are located on opposite sides of the cavity 10.

[0029] Referring to Figures 4 to 6, in some embodiments, the pipe fitting 20 may be, but is not limited to, a U-shaped pipe. Here, the heating section 22 of the pipe fitting 20 includes a first heating section 221, a U-shaped heating section 222, and a second heating section 223 connected in sequence. Specifically, one end of the first heating section 221 is connected to the inlet end 21, and the other end is connected to the U-shaped heating section 222; one end of the second heating section 223 is connected to the outlet end 23, and the other end is connected to the U-shaped heating section 222. Here, the first heating section 221 and the second heating section 223 are located on the same side of the U-shaped heating section 222. In these embodiments, the first opening 121 and the second opening 122 of the cavity 10 are disposed on the same end face 12, such that the inlet end 21 connected to the first heating section 221 and the outlet end 23 connected to the second heating section 223 are located on the same end face 12 or extend from the same end face 12 out of the cavity 10. This allows aerosols to be input / output from the same side of cavity 10, facilitating pipeline configuration.

[0030] In some embodiments, the cavity 10 is used with one of its side surfaces 11 against the use surface (as shown in Figure 4). In this use state, the first heating section 221 of the heating part 22 of the tube 20 is located above the second heating section 223 in the direction of gravity (the direction parallel to the end face 12 in Figure 4).

[0031] Referring to FIG3, in some embodiments, the radiant heat source 30 includes a surface layer 31 and a heating element 32, the surface layer 31 covering the heating element 32 and having a heating surface 311. In some embodiments, there are two radiant heat sources 30, which are respectively located on opposite sides of the heating portion 22 of the pipe fitting 20.

[0032] Referring to Figure 5, in some embodiments, the pipe 20 has a wall thickness T, and there is a gap between the heating surface 311 of the radiant heat source 30 and the pipe 20. The shortest distance between the outer surface of the pipe 20 and the heating surface 311 is the arrangement distance P. The arrangement distance P is greater than zero. In some embodiments, the ratio of the arrangement distance P to the wall thickness T is between 0.5 and 3. Preferably, the ratio of the arrangement distance P to the wall thickness T is 1.13. Thus, an appropriate arrangement distance P enables the radiant heat source 30 to exert a better heating effect on the pipe 20.

[0033] Generally speaking, the intensity of the radiant heat source 30 is inversely proportional to the square of the distance (configuration distance P); that is, when the configuration distance P doubles, the intensity of the radiant heat source 30 will decrease to one-quarter of its original value. Therefore, this application does not limit the ratio of the configuration distance P to the pipe wall thickness T. In some embodiments, the configuration distance P can be set according to actual needs, such as the amount of aerosol, the pipe wall thickness T and length of the heating part 22 of the pipe fitting 20, and the power of the radiant heat source 30.

[0034] In some embodiments, the radiant heat source 30 is an infrared heat source capable of emitting infrared (IR) radiation. It is worth noting that infrared radiation is an electromagnetic wave that does not require a medium for transmission. In some embodiments where the radiant heat source 30 is an infrared heat source, the radiant heat source 30 can have different wavelengths and emit different radiant heat energy based on different heating elements 32. In these embodiments, the radiant heat source 30 can emit infrared radiation of different wavelengths depending on the material of the surface layer 31 and the configuration of different heating elements 32.

[0035] In some embodiments, the radiative heat source 30 can emit infrared radiation with wavelengths of 0.75 micrometers (µm) to 1000 micrometers (µm). That is, the radiative heat source 30 can include a near-infrared (NIR) heat source, a short-wavelength infrared (SWIR) heat source, a middle-wavelength infrared (MWIR) heat source, a long-wavelength infrared (LWIR) heat source, and a far-infrared (FIR) heat source (5 micrometers (µm) to 1000 micrometers (µm)).

[0036] In some embodiments, the surface layer 31 of the radiant heat source 30 is made of ceramic, making the radiant heat source 30 an infrared heat source. In these embodiments, the wavelength emitted by the radiant heat source 30 is between 2 micrometers (µm) and 20 micrometers (µm). In some embodiments where the surface layer 31 of the radiant heat source 30 is made of ceramic, the surface layer 31 may be, but is not limited to, plate-shaped or cylindrical. In some embodiments where the surface layer 31 is plate-shaped, the radiant heat source 30 becomes a far-infrared ceramic heating plate; in some embodiments where the surface layer 31 is cylindrical, the radiant heat source 30 becomes a far-infrared ceramic heating tube. In some other embodiments where the radiant heat source 30 is an infrared heat source, the surface layer 31 of the radiant heat source 30 may also be made of magnesium oxide, carbon fiber, or quartz.

[0037] In some embodiments, the radiant heat source 30 is a near-infrared heat source. In these embodiments, the radiant heat source 30 is a halogen heating lamp.

[0038] When receiving infrared radiation energy, different substances will have different infrared absorption spectra, and the absorption intensity of infrared radiation of different wavelengths will be different. In some embodiments where the radiant heat source 30 is a short-wavelength infrared heat source, the radiant heat source 30 can penetrate most solid materials. In these embodiments, the tube 20 is made of a metallic material, which has better infrared absorption. In some embodiments where the radiant heat source 30 is a mid-wavelength infrared heat source, the radiant heat source 30 can be mostly absorbed by the surface of the object. In these embodiments, the tube 20 is made of a polymer, plastic, or glass, which has better infrared absorption. Therefore, the material or surface condition of the tube 20 varies depending on the wavelength of the radiant heat source 30.

[0039] In some embodiments where the radiant heat source 30 is a far-infrared heat source, the tube 20 is made of a material that allows infrared light to penetrate and be heated. For example, but not limited to, it is made of translucent quartz, sapphire, or glass. In these embodiments, the high-temperature resistance and corrosion resistance of quartz allow the tube 20 to transport corrosive aerosols (e.g., hydrogen peroxide, hydrochloric acid), while preventing corrosion of the tube 20 during the drying process and enabling it to withstand the required drying temperature, thus improving the stability of the aerosol dryer H. In some embodiments, the tube 20 may also be made of translucent and heat-resistant materials such as glass or sapphire; this invention is not limited to this.

[0040] Referring to Figures 3 to 6, in some embodiments, the aerosol dryer H further includes an insulation layer 40. In these embodiments, the cavity 10 has an inner surface 14 that surrounds the internal space 13, and the insulation layer 40 is disposed on the inner surface 14 and surrounds the radiant heat source 30 and the pipe fitting 20. In some embodiments, the insulation layer 40 may be made of ceramic fiber or aluminum silicate fiber. This reduces the chance of temperature loss within the cavity 10, maintains the temperature within the cavity 10, and reduces the energy required for heating; in addition, it also prevents heat leakage and avoids high temperatures affecting external components or circuits.

[0041] Referring to Figure 4, in some embodiments, the aerosol dryer H further includes a temperature sensor 50 disposed on the outer surface of the first heating section 221. In some embodiments, the temperature sensor 50 is disposed at the center of the second heating section 223 in the length direction D1, but this embodiment is not limited thereto. This is used to measure the temperature of the tube 20 to ensure the output of the required aerosol temperature.

[0042] Referring to Figures 3 to 6, in some embodiments, the aerosol dryer H further includes a closed shell 60, which houses the cavity 10, the tubing 20, and the radiant heat source 30. In these embodiments, the closed shell 60 is a hollow structure larger than the cavity 10, and when the cavity 10 is housed within the closed shell 60, the outer surface of the cavity 10 and the inner surface of the closed shell 60 are spaced apart from each other. This reduces temperature conduction between the cavity 10 and the closed shell 60, ensuring the insulation of the cavity 10.

[0043] Referring to Figures 3 to 6, in some embodiments, the enclosed shell 60 further includes a plurality of support members 61, which are supported between the outer surface of the cavity 10 and the inner surface of the enclosed shell 60. In some embodiments, the support member 61 is a long rod extending along the length direction D1. In these embodiments, the support member 61 has a support width W1 in the width direction D2, and the side 11 of the cavity 10 has a cavity width W2 in the width direction D2. The support width W1 of the support member 61 is 10% to 15% of the cavity width W2 of the cavity 10, and the number of support members 61 abutting against the same plane as the cavity 10 is at least 1 and not more than 4. In the embodiments shown in Figures 2, 4, and 6, the support width W1 of the support member 61 is 11% of the cavity width W2, and the number of support members 61 abutting against the same plane as the cavity 10 is 2, but this application is not limited to this. This effectively reduces the area of ​​direct or indirect contact between the outer surface of the cavity 10 and the inner surface of the enclosed shell 60, thereby effectively improving the thermal insulation of the cavity 10.

[0044] In some embodiments, the enclosed housing 60 further includes a first valve body 62 and a second valve body 63. In these embodiments, the inlet end 21 and outlet end 23 of the pipe 20 extend out of the cavity 10 and are connected to the first valve body 62 and the second valve body 63, respectively, whereby aerosol can be input through the first valve body 62 and output through the second valve body 63. In these embodiments, the pipe 20 is completely covered by the enclosed housing 60, providing complete insulation and coverage for the pipe 20.

[0045] In some embodiments, the enclosed housing 60 is made of a material that is resistant to high temperatures, acids and alkalis, and corrosion. Since the temperature of the cavity 10 varies depending on the required outlet temperature of the aerosol, and the required outlet temperature can vary depending on the characteristics of the aerosol itself. For example, when the aerosol is formed by the atomization of hydrogen peroxide, in order to reduce the concentration of the aerosol, the required outlet temperature is controlled above 220 degrees Celsius so that the hydrogen peroxide can be partially decomposed, effectively reducing the corrosiveness of the aerosol and extending the lifespan of the overall system. In some embodiments, the enclosed housing 60 may be, but is not limited to, made of phenolic resin (PF) (commonly known as bakelite or phenolic resin) or polypropylene (PP). Phenolic resin has high temperature resistance, flame retardancy, water resistance, and insulation properties; while polypropylene also has acid and alkali resistance, high temperature resistance, and high toughness, thereby improving the overall structural stability of the aerosol dryer H.

[0046] Based on the foregoing, referring to Figure 8, the aerosol dryer H can be applied to the liquid particle detection system 70. The liquid particle detection system 70 includes a test liquid tank 71, an atomizer 72, an aerosol dryer H, an electrostatic neutralization chamber 73, a particle separator 74, a counter 75, and a controller 76. The test liquid tank 71 stores the test liquid. The atomizer 72 is connected to the test liquid tank 71. The aerosol dryer H is connected to the atomizer 72. The electrostatic neutralization chamber 73 is connected to the aerosol dryer H. The particle separator 74 is connected to the electrostatic neutralization chamber 73. The counter 75 is connected to the particle separator 74. The controller 76 is electrically connected to the atomizer 72, the aerosol dryer H, the electrostatic neutralization chamber 73, the particle separator 74, and the counter 75. Specifically, controller 76 controls atomizer 72 to atomize the liquid to be tested into an aerosol; controller 76 controls aerosol dryer H to heat and dry the aerosol; controller 76 controls electrostatic neutralization chamber 73 to neutralize the electrostatics of the aerosol; controller 76 controls particle separator 74 to generate a flow field and apply an electric field to the aerosol, thereby separating multiple particles in the aerosol according to their particle size; controller 76 controls counter 75 to amplify the separated particles, calculate the number of equal particles, and output the counting information.

[0047] In this way, the aerosol generated by the atomizer 72 can be directly input into the aerosol dryer H, and the aerosol dried by the aerosol dryer H can be directly input into the electrostatic neutralization chamber 73 and then carried out in sequence for subsequent detection. [Simplified Explanation of the Diagram]

[0048] Figure 1 is a perspective view of one embodiment of the aerosol dryer of this application. Figure 2 is a schematic diagram of the cavity of one embodiment of the aerosol dryer of this application separated from the closed shell. Figure 3 is an exploded view of the cavity of one embodiment of the aerosol dryer of this application. Figure 4 is a cross-sectional view drawn along section line 4-4 in Figure 1. Figure 5 is a cross-sectional view drawn along section line 5-5 in Figure 1. Figure 6 is a cross-sectional view drawn along section line 6-6 in Figure 1. Figure 7 is a schematic diagram of another embodiment of the cavity of the aerosol dryer of this application. Figure 8 is a system schematic diagram of the aerosol dryer of this application applied to a liquid particle detection system.

Claims

1. An aerosol dryer, adapted to be connected between an atomizer and a counter, the atomizer generating an aerosol, the counter counting the number of particles in the dried aerosol, comprising: A cavity having an internal space, a first opening, and a second opening, the first opening and the second opening penetrating the cavity and respectively communicating with the internal space; a pipe comprising an inlet end, a heating part, and an outlet end connected in sequence, the inlet end being located at the first opening of the cavity, the outlet end being located at the second opening of the cavity, and the heating part being located in the internal space of the cavity; and a radiant heat source disposed within the internal space of the cavity; the radiant heat source including a heating surface facing the heating part of the pipe; wherein the pipe receives the aerosol from the inlet end, the radiant heat source emits radiant heat to heat the aerosol in the heating part, and the aerosol is dried and output from the outlet end.

2. The aerosol dryer as claimed in claim 1 further includes an insulation layer disposed on an inner surface of the cavity and surrounding the radiant heat source and the pipe fitting.

3. The aerosol dryer as claimed in claim 1, wherein the heating section of the tube includes a first heating section, a U-shaped heating section and a second heating section; one end of the first heating section is connected to the inlet end and the other end is connected to the U-shaped heating section; one end of the second heating section is connected to the outlet end and the other end is connected to the U-shaped heating section; the first heating section is located above the second heating section along a gravity direction.

4. The aerosol dryer as claimed in claim 3 further includes a temperature sensor disposed at a central position in a longitudinal direction of the second heating section.

5. The aerosol dryer as described in claim 1, wherein the radiant heat source is an infrared heat source.

6. The aerosol dryer as claimed in claim 5, wherein the radiant heat source includes a surface layer and a heating element, the surface layer covering the heating element, and the heating surface being located on the surface layer.

7. The aerosol dryer as claimed in claim 1, wherein the tube is made of a light-transmitting material.

8. The aerosol dryer as claimed in claim 7, wherein the tube is made of a material such as quartz, sapphire, or glass that can be heated by infrared light.

9. The aerosol dryer as claimed in claim 1 further includes a closed housing that houses the cavity, the tubing, and the radiant heat source.

10. A liquid particle detection system, comprising: a test liquid tank storing a test liquid; an atomizer connected to the test liquid tank; an aerosol dryer as described in any one of claims 1 to 9, connected to the atomizer; an electrostatic neutralization chamber connected to the aerosol dryer; a particle separator connected to the electrostatic neutralization chamber; a counter connected to the particle separator; and a controller electrically connected to the atomizer, the aerosol dryer, the electrostatic neutralization chamber, the particle separator, and the counter; wherein, The controller controls the atomizer to atomize the liquid to be tested into the aerosol; the controller controls the aerosol dryer to heat and dry the aerosol; the controller controls the electrostatic neutralization chamber to electrostatically neutralize the aerosol; the controller controls the particle separator to generate a flow field and apply an electric field to the aerosol, so that multiple particles in the aerosol are separated according to their particle size; the controller controls the counter to amplify the separated particles, calculate the number of particles, and output a count information.

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