Aerosol dilution module and detection system for particles in liquid

Abstract

An aerosol dilution module and a detection system for particles in liquid. The aerosol dilution module includes a controller, an atomization assembly, a dilution assembly, an exhaust assembly, and an output assembly. The atomization assembly, the dilution assembly, the exhaust assembly, and the output assembly are connected to the controller. The atomization assembly includes an atomization chamber, a first air input unit, and a liquid to be measured supply unit. The first air input unit is connected to the atomization chamber and configured to input a first clean dry air. The dilution assembly is connected to the atomization chamber and includes a second air input unit. The second air input unit is configured to input a second clean dry air. The exhaust assembly is configured to discharge a redundant aerosol. The output assembly is configured to receive a diluted third aerosol. The controller controls the atomization assembly to form a first aerosol and dilute and controls a flow of the first clean dry air, the second clean dry air, and the redundant aerosol according to a dilution rate and a flow of the third aerosol.

Description

[Technical Field]

[0001] This application relates to a dilution module and a liquid particle detection system, particularly a dilution module for diluting aerosols and a liquid particle detection system containing the dilution module. [Previous Technology]

[0002] In semiconductor manufacturing processes, various chemical solutions are commonly used to perform different chemical treatments on the substrate to form tiny integrated circuits or perform surface treatments. As the precision of semiconductors advances to the nanometer level, each step in the process has a significant impact on the process yield. Therefore, it is necessary to regularly test the chemicals used in the process to ensure the process yield.

[0003] For surface treatment methods using aerosols, precision detection instruments are required to detect particles in the aerosol. Currently, common devices for particle detection include optical particle counters (OPC), liquid particle counters (LPC), and scanning mobility particle size analyzers (SMPS). Among these, the optical particle counter's particle size detection range is approximately in the micrometer range, making it difficult to detect particles in the nanometer range; the liquid particle counter (LPC) cannot detect particles smaller than 20 nm; and the scanning mobility particle size analyzer, due to its composition of numerous precision components and high cost, is unsuitable for detecting corrosive aerosols and therefore requires improvement. [Summary of the Invention]

[0004] To address the aforementioned problems, this application provides an aerosol dilution module and a liquid particle detection system including the aerosol dilution module. The aerosol dilution module includes an atomizing component, a dilution component, an emission component, an output component, and a controller. The atomizing component includes an atomizing chamber, a first gas input unit, and a test liquid supply unit. The atomizing chamber includes an atomizing space and a first opening, a second opening, a third opening, and a fourth opening communicating with the atomizing space. In the height direction, the third opening is higher than the fourth opening, and the first opening is located between the third and fourth openings. The first gas input unit is connected to the first opening to input a first clean, dry air. The test liquid supply unit is connected to the second opening. The dilution component includes a dilution chamber and a second gas input unit. The dilution chamber is connected to the third opening. The second gas input unit is connected to the dilution chamber to input a second clean, dry air. The emission component is connected to the dilution chamber to discharge redundant aerosols. The output component is connected to the emission component to receive a diluted third aerosol. The controller connects to the atomizing component, dilution component, emission component, and output component. The controller controls the atomizing component to atomize the test liquid into a first aerosol. A portion of the first aerosol enters the dilution chamber through the third opening, and the remaining portion of the first aerosol forms an aerosol condensate and is output through the fourth opening. The controller controls the flow rates of the first clean dry air, the second clean dry air, and the redundant aerosol based on the dilution rate and flow rate of the third aerosol relative to the first aerosol.

[0005] This application further provides a liquid particle detection system, comprising the aforementioned aerosol dilution module, aerosol dryer, electrostatic neutralizer, particle separator, and counter. The controller controls the aerosol dilution module to output a third aerosol; the controller controls the aerosol dryer to heat and dry the third aerosol; the controller controls the electrostatic neutralizer to electrostatically neutralize the third aerosol; the controller controls the particle separator to generate a flow field and apply an electric field to the third aerosol, causing a plurality of particles in the third aerosol to separate according to their particle size; the controller controls the counter to agglomerate and amplify the separated particles, calculate the number of particles, and output count information.

Implementation Method

[0006] Before this application is described in detail in various embodiments, please note that in the following description, the drawings of this application are only for illustration and are not necessarily drawn to scale, and not all details are necessarily presented in the drawings.

[0007] Referring to Figures 1 and 2, the aerosol dilution module D includes an atomizing component 10, a dilution component 20, an emission component 30, an output component 40, and a controller 50. The controller 50 controls the atomizing component 10 to generate a first aerosol A1 and controls the dilution component 20 to dilute the first aerosol A1 into a second aerosol A2. Furthermore, the controller 50 controls the flow rate of redundant aerosol A21 output by the emission component 30 according to the required flow rate and dilution rate of the third aerosol A3, ensuring that the flow rate and dilution rate of the third aerosol A3 output by the output component 40 can be precisely controlled to meet the requirements.

[0008] Referring to Figures 1 and 2, the atomizing assembly 10 includes an atomizing chamber 11, a first gas input unit 12, and a test liquid supply unit 13. The atomizing chamber 11 includes an atomizing space 111 and a first opening 112, a second opening 113, a third opening 114, and a fourth opening 115 communicating with the atomizing space 111. In the height direction V, the third opening 114 is higher than the fourth opening 115, and the first opening 112 is located between the third opening 114 and the fourth opening 115. The first gas input unit 12 is connected to the first opening 112 to input first clean and dry air C1. The test liquid supply unit 13 is connected to the second opening 113. The dilution assembly 20 includes a dilution chamber 21 and a second gas input unit 22. The dilution chamber 21 is connected to the third opening 114. The second gas input unit 22 is connected to the dilution chamber 21 to input second clean and dry air C2. The emission assembly 30 is connected to the dilution chamber 21 to emission redundant aerosol A21. Output component 40 is connected to emission component 30 to receive third aerosol A3. Controller 50 is connected to atomizing component 10, dilution component 20, emission component 30 and output component 40. Controller 50 controls atomizing component 10 to atomize the test liquid L into first aerosol A1. Part of the first aerosol A1 enters dilution chamber 21 through third opening 114, and the remaining first aerosol A1 forms aerosol condensate A11 and is output through fourth opening 115. Controller 50 controls the flow rates of first clean dry air C1, second clean dry air C2 and redundant aerosol A21 according to the required dilution rate and flow rate of third aerosol A3 relative to first aerosol A1.

[0009] Accordingly, the controller 50 controls the atomizing component 10 to generate the first aerosol A1, controls the dilution component 20 to dilute the first aerosol A1, and controls the output flow of the emission component 30 according to the required flow rate and dilution rate of the third aerosol A3, so as to ensure that the flow rate and dilution rate of the third aerosol A3 output by the output component 40 can be accurately controlled to meet the requirements. In this way, the third aerosol A3 with precise control of dilution rate and flow rate can be provided, reducing the corrosiveness of corrosive aerosols to the detection system.

[0010] The atomizing component 10 is used to generate the first aerosol A1. Aerosols (also known as air suspensions, aerogels, or smoke particles) refer to a dispersion system formed when solid or liquid particles are stably suspended in a gaseous medium. The particulate matter is called suspended particles, and their particle size is mostly between 0.01 and 10 micrometers.

[0011] Referring to Figures 1 and 2, the atomizing chamber 11 provides a space for generating the first aerosol A1. In some embodiments, the atomizing chamber 11 includes a first surface 11A and a second surface 11B. The first surface 11A extends along the height direction V, which is perpendicular to the horizontal direction H, and the second surface 11B is angledly connected to the first surface 11A. In these embodiments, a first opening 112 is disposed through the first surface 11A, and a second opening 113 is disposed through the second surface 11B, thereby opening the first opening 112 and the second opening 113 in different directions toward the atomizing chamber 11 and located in different height directions V.

[0012] Referring to Figures 1 and 2, in these embodiments, the first gas input unit 12 inputs first clean and dry air C1 from the first opening 112 along the horizontal direction H, while the test liquid supply unit 13 connected to the second opening 113 can supply the test liquid L along the height direction V. Since there is an angle between the first surface 11A and the second surface 11B, and the opening directions of the first opening 112 and the second opening 113 are different, the horizontal direction H of the first clean and dry air C1 entering the atomizing chamber 11 from the first opening 112 and the height direction V of the test liquid L entering the atomizing chamber 11 from the second opening 113 form an angle. In this way, when the first clean and dry air C1 enters the atomizing chamber 11 through the first opening 112, the first clean and dry air C1 converges at the second opening 113, generating a negative pressure at the second opening 113. This draws the test liquid L from the test liquid supply unit 13 into the atomizing chamber 11. After the test liquid L is drawn into the atomizing chamber 11, it is dispersed and atomized by the first clean and dry air C1 into tiny droplets or particles, which are suspended in the gas to become the first aerosol A1. In some embodiments, the test liquid supply unit 13 may be, but is not limited to, a tank or container capable of holding the test liquid L.

[0013] Referring to Figures 1 and 2, in some embodiments, the horizontal direction H of the first clean and dry air C1 entering the atomizing chamber 11 from the first opening 112 is orthogonal to the height direction V of the liquid to be tested L entering the atomizing chamber 11 from the second opening 113, thus forming a cross-flow atomizer, but this invention is not limited thereto.

[0014] Referring to Figures 1 and 2, in some embodiments, the atomizing cavity 11 further includes a third surface 11C and a fourth surface 11D. The third surface 11C is parallel to the first surface 11A and faces the first opening 112, and the third surface 11C has a gap between itself and the first surface 11A and the second surface 11B in the horizontal direction H. The fourth surface 11D is angularly connected to one end of the third surface 11C and is parallel to the second surface 11B. In these embodiments, the length of the third surface 11C extending in the height direction V is greater than the length of the first surface 11A extending in the height direction V. Here, the third opening 114 is disposed through the third surface 11C, and in the height direction V, the third opening 114 is higher than the first opening 112. The fourth opening 115 is connected to the other end of the third surface 11C, and the position of the fourth opening 115 in the height direction V is lower than the first opening 112 and the second opening 113. In this way, when the first aerosol A1 is generated, the first aerosol A1 moves toward the third surface 11C. When the first aerosol A1 comes into contact with the third surface 11C, the first aerosol A1 impacts the third surface 11C, causing part of the first aerosol A1 to condense into aerosol condensate A11. The condensed aerosol condensate A11 is affected by gravity and outputs to the lower fourth opening 115, while the remaining part of the first aerosol A1 diffuses upward to the third opening 114 and is output to the atomizing chamber 11.

[0015] Referring to Figures 1 and 2, in some embodiments, the first gas input unit 12 includes a first gas storage tank 121 and a first gas flow controller 122. The first gas flow controller 122 controls the flow rate of first clean dry air C1 output from the first gas storage tank 121 into the atomizing chamber 11. Here, the first clean dry air C1 may be, but is not limited to, clean dry air (CDA), dry clean nitrogen, or dry clean inert gas.

[0016] Since the purpose of the aerosol dilution module D is to output a third aerosol A3 with a specific dilution rate and flow rate, and the dilution rate and flow rate of the third aerosol A3 are closely related to the flow rate of the first aerosol A1 and the flow rate of the second clean and dry air C2 added to dilute the first aerosol A1, the flow rate of the first aerosol A1 depends on the flow rate of the first clean and dry air C1. Therefore, in order to provide a third aerosol A3 with a precisely controlled dilution rate, the flow rate of the first clean and dry air C1 must also be precisely controlled.

[0017] Therefore, in some embodiments, the first gas flow controller 122 is a mass flow controller (MFC). The first gas flow controller 122 of the mass flow controller type is a precision electromechanical combination of a flow meter and a control valve, mainly including a gas flow sensor, a distributor channel, a flow regulating valve, and an amplifier controller. The gas flow sensor measures the mass flow rate of the gas using the capillary heat transfer thermocalorimetry principle. The flow signal measured by the heating bridge of the gas flow sensor is sent to the amplifier controller for amplification. The amplified flow detection voltage is compared with a set voltage, and the flow regulating valve is controlled based on the amplified difference signal, thus controlling the flow rate through the channel in a closed loop. The distributor channel determines the flow rate of the main channel. In this way, the mass flow controller uses thermal difference to measure the mass flow rate of the gas in a non-contact manner, avoiding the influence of environmental pressure and gas volume to provide accurate gas flow control.

[0018] Referring to Figures 1 and 2, in some embodiments, the atomizing chamber 11 further includes a first extension tube 116, which is a hollow tube. In these embodiments, the first extension tube 116 extends its length along the height direction V, with one end connected to the second opening 113 and the other end extending into the test liquid supply unit 13. This allows the atomizing chamber 11 to be inserted into the test liquid supply unit 13 via the first extension tube 116, preventing leakage of the test liquid L.

[0019] The dilution assembly 20 is used to dilute the first aerosol A1 from the third opening 114 of the atomizing chamber 11. The dilution chamber 21 provides space for the first aerosol A1 to be mixed and diluted with the second clean, dry air C2 added for diluting the first aerosol A1.

[0020] Referring to Figures 1 and 2, in some embodiments, the dilution chamber 21 includes a dilution space 211 and a first port 212, a second port 213, and a third port 214 communicating with the dilution space 211. The first port 212 is used to connect to the atomizing chamber 11, the second port 213 is used to receive second clean and dry air C2 for diluting the first aerosol A1, and the third port 214 is used to output the diluted second aerosol A2 (a mixture of the first aerosol A1 and the second clean and dry air C2). Here, the flow rate of the second clean and dry air C2 is less than the flow rate of the first clean and dry air C1.

[0021] Referring to Figures 1 and 2, in some embodiments, the third opening 114 of the atomizing chamber 11, the first through-hole 212 and the third through-hole 214 of the dilution chamber 21 are coaxially configured. That is, the central axes of the third opening 114 of the atomizing chamber 11, the first through-hole 212 and the third through-hole 214 of the dilution chamber 21 are located on the same height direction V. This reduces the possibility of turbulence occurring during the process of the first aerosol A1 passing through the atomizing chamber 11 and being output from the dilution chamber 21, reduces the probability of the first aerosol A1 adhering to or condensing in the dilution chamber 21, and improves the dilution accuracy of the second aerosol A2.

[0022] Referring to Figures 1 and 2, in some embodiments, the atomizing chamber 11 further includes a second extension tube 117, which is a hollow tube. In these embodiments, the second extension tube 117 extends its length in the horizontal direction H, with one end connected to the third opening 114 and the other end extending into the dilution chamber 21. This allows the atomizing chamber 11 to be inserted into the dilution chamber 21 via the second extension tube 117, preventing leakage of the first aerosol A1 and ensuring the accuracy of subsequent control.

[0023] Referring to Figures 1 and 2, in some embodiments, the second port 213 of the dilution chamber 21 is located between the first port 212 and the third port 214 in the horizontal direction H, and the position of the second port 213 in the vertical direction V is lower than that of the first port 212 and the third port 214. In these embodiments, the second gas input unit 22 is connected to the second port 213, and the second clean and dry air C2 input into the dilution chamber 21 from the second gas input unit 22 can be fully mixed and diluted with the first aerosol A1 in the dilution space 211 to become the second aerosol A2.

[0024] Referring to Figures 1 and 2, in some embodiments, the second gas input unit 22 includes a second gas storage tank 221 and a second gas flow controller 222. The second gas flow controller 222 controls the flow rate of second clean dry air C2 output from the second gas storage tank 221 into the dilution chamber 21. Here, the second clean dry air C2 may be, but is not limited to, clean dry air (CDA), dry clean nitrogen, or dry clean inert gas. In some embodiments, the second gas flow controller 222 is a mass flow meter (MFC).

[0025] The emission component 30 is used to emit redundant aerosol A21. Redundant aerosol A21 refers to the portion of the second aerosol A2 other than the required output third aerosol A3. That is, generally speaking, the aerosol dilution module D can provide a third aerosol A3 with a preset dilution rate and flow rate according to demand. However, in order to supply the third aerosol A3 at different flow rates, the second aerosol A2 generated by the aerosol dilution module D in the dilution component 20 must be greater than the amount of third aerosol A3 that can be provided. Therefore, the flow rate of the second aerosol A2 generated by the dilution component 20 is usually greater than the flow rate of the third aerosol A3 output by the output component 40. In this case, the emission component 30 emits redundant aerosol A21 to adjust the flow rate of the third aerosol A3, ensuring that the flow rate of the third aerosol A3 output by the output component 40 meets the requirements.

[0026] Referring to Figures 1 and 2, based on the law of conservation of mass, in the aerosol dilution module D, the total flow rate of the gas entering the aerosol dilution module D should be equal to the total flow rate of the gas exiting the aerosol dilution module D. That is, the total flow rate input to the aerosol dilution module D from the first gas input unit 12 and the second gas input unit 22 should be equal to the total flow rate of the aerosol condensate A11, redundant aerosol A21, and third aerosol A3 output from the aerosol dilution module D. The aforementioned first clean dry air C1 has a first flow rate Q1, aerosol condensate A11 has a second flow rate Q2, second clean dry air C2 has a third flow rate Q3, redundant aerosol A21 has a fourth flow rate Q4, and third aerosol A3 has a fifth flow rate Q5. Based on the law of conservation of mass, the first flow rate Q1 + the third flow rate Q3 = the second flow rate Q2 + the fourth flow rate Q4 + the fifth flow rate Q5.

[0027] In order to ensure that the fifth flow rate Q5 of the output third aerosol A3 meets the requirements, under the condition that the first flow rate Q1 and the third flow rate Q3 can be controlled by the first gas flow controller 122 and the second gas flow controller 222 and the fifth flow rate Q5 is known, since the aerosol condensate A11 condensed and discharged in the atomizing chamber 11 cannot be quantitatively controlled, the fourth flow rate Q4 can be determined by estimating the second flow rate Q2 through the dilution rate, and the fifth flow rate Q5 can be ensured to meet the expectations by controlling the fourth flow rate Q4.

[0028] Here, the dilution rate of the third aerosol A3 relative to the first aerosol A1 can be obtained from the first flow rate Q1 of the first clean dry air C1, the third flow rate Q3 of the second clean dry air C2, the second flow rate Q2 of the aerosol condensate A11, and the dilution rate calculation formula. The dilution rate calculation formula is (first flow rate Q1 - second flow rate Q2) ÷ ((first flow rate Q1 - second flow rate Q2) + third flow rate Q3). Through the controllable first flow rate Q1, third flow rate Q3, and the known dilution rate calculation formula, the second flow rate Q2 of the aerosol condensate A11, which cannot be quantitatively controlled, can be calculated.

[0029] Next, the fourth flow rate Q4 of redundant aerosol A21 can be controlled based on the calculated second flow rate Q2 of aerosol condensate A11, and the fifth flow rate Q5 of third aerosol A3 can be determined. Based on the foregoing, the controller 50 can calculate the second flow rate Q2 and the fourth flow rate Q4 based on the dilution rate and flow rate of the third aerosol A3, and control the fourth flow rate Q4 of redundant aerosol A21 emitted by the emission assembly 30 accordingly.

[0030] Referring to Figures 1 and 2, in some embodiments, the emission assembly 30 includes an emission pipe 31, an orifice plate 32, and a vacuum pump 33. The emission pipe 31 has a communicating inlet 311, a first outlet 312, and a second outlet 313. The emission pipe 31 is connected to a third through-hole 214 of the dilution chamber 21 via the inlet 311 to receive the second aerosol A2. The orifice plate 32 is connected to the first outlet 312 of the emission pipe 31. Under the control of the controller 50, the vacuum pump 33 draws a portion of the second aerosol A2 from the emission pipe 31 through the orifice plate 32, converts it into redundant aerosol A21, and discharges it. The second outlet 313 can output the third aerosol A3.

[0031] The orifice plate 32 is a plate-shaped structure with a throttling orifice. The throttling orifice has a necked-out section. The orifice plate 32 is disposed in the first outlet 312 or in a pipe connected to the first outlet 312. When the second aerosol A2 passes through the orifice plate 32, a small pressure is established upstream of the orifice plate 32. However, after the second aerosol A2 is concentrated by force and passes through the throttling orifice of the orifice plate 32, the flow velocity increases and the pressure decreases. Then, the second aerosol A2 reaches maximum convergence at the neck position downstream of the orifice plate 32; here, the flow velocity reaches its maximum and the pressure drops to its minimum. When the pressure of the second aerosol A2 as it flows through the throttling orifice drops to a value exceeding the critical pressure, the flow rate through the throttling orifice will maintain a certain value and no longer increase. In this way, the fourth flow rate Q4 of the redundant aerosol A21 can be limited through the orifice plate 32.

[0032] In some embodiments, the combination of the orifice plate 32 of the emission assembly 30 and the vacuum pump 33 can also be replaced by a mass flow controller, through which the fourth flow rate Q4 of the redundant aerosol A21 can be precisely controlled.

[0033] In some embodiments, the test liquid L is a highly corrosive liquid, such as hydrochloric acid, sulfuric acid, or hydrogen peroxide. In these embodiments, due to the highly corrosive nature of the test liquid L, the first aerosol A1 formed after the test liquid L is atomized is also highly corrosive. Therefore, when the test liquid L is a highly corrosive liquid, the discharge assembly 30 preferably uses a combination of an orifice plate 32 and a vacuum pump 33 to control the flow rate. In these embodiments, when the orifice plate 32 is corroded, the purpose of flow control can be maintained by replacing the orifice plate 32, which can effectively reduce maintenance costs compared to using a mass flow controller to control the flow rate.

[0034] The output component 40 is used to receive the third aerosol A3 from the discharged redundant aerosol A21 via the discharge component 30. In some embodiments, the output component 40 may be selected from a combination of an orifice plate and a vacuum pump, or a mass flow controller, depending on the characteristics of the test liquid L; this invention is not limited thereto. The third aerosol A3 is received through the output component 40 at a controllable fifth flow rate Q5.

[0035] In some embodiments where the test liquid L is a highly corrosive liquid, the atomizing chamber 11, the dilution chamber 21, and the discharge pipe 31 of the discharge assembly 30 are made of corrosion-resistant material. This reduces the damage to the components within the aerosol dilution module D caused by the highly corrosive aerosol.

[0036] It is worth noting that after the test liquid L is atomized into the first aerosol A1, the first aerosol A1 and the diluted second aerosol A2 and third aerosol A3 become charged. Therefore, the dilution chamber 21 and the discharge pipe 31 are made of an electrical conductor material to avoid the dilution chamber 21 and the discharge pipe 31 from generating static electricity and adsorbing the second aerosol A2 and the third aerosol A3, which would affect the flow rate and dilution rate control accuracy of the aerosol dilution module D.

[0037] Referring to Figures 1 to 4, based on the foregoing, the aerosol dilution module D is applicable to a liquid particle detection system, which includes the aforementioned aerosol dilution module D, aerosol dryer 60, and analysis module 70. Aerosol dryer 60 is connected to aerosol dilution module D, and analysis module 70 is connected to aerosol dryer 60. Aerosol dryer 60 receives the second aerosol A2 from aerosol dilution module D and heats and dries the second aerosol A2. Analysis module 70 analyzes the dried second aerosol A2.

[0038] In some embodiments, the analysis module 70 includes an electrostatic neutralizer 71, a particle separator 72, and a counter 73. The electrostatic neutralizer 71 is connected to the aerosol dryer 60. The particle separator 72 is connected to the electrostatic neutralizer 71. The counter 73 is connected to the particle separator 72. The controller 50 is electrically connected to the aerosol dilution module D, the aerosol dryer 60, the electrostatic neutralizer 71, the particle separator 72, and the counter 73. Here, controller 50 controls aerosol dilution module D to atomize the test liquid L into a first aerosol A1 and outputs a diluted third aerosol A3 with controlled flow rate; controller 50 controls aerosol dryer 60 to heat and dry the third aerosol A3; controller 50 controls electrostatic neutralizer 71 to electrostatically neutralize the third aerosol A3; controller 50 controls particle separator 72 to generate a flow field and apply an electric field to the third aerosol A3, causing multiple particles in the third aerosol A3 to separate according to particle size; controller 50 controls counter 73 to amplify the separated particles, calculate the number of equal particles, and output counting information.

[0039] In some embodiments, the analysis module 70 is a scanning motion particle size analyzer (SMPS). A scanning motion particle size analyzer can measure the physical properties of aerosol spectral distribution within a certain particle size range in a gas. The analysis module 70, in the form of a scanning motion particle size analyzer, is suitable for measuring the number concentration and mass concentration parameters of particles in the 2.5-1000 nm particle size range.

[0040] In some embodiments, the particle separator 72 may be a differential mobility analyzer (DMA), which can sieve particles by utilizing the difference in electromobility of charged particles of different sizes under an electric field. In some embodiments, the counter 73 is a differential and condensation particle counter (CPC), used to measure the number concentration of particles after DMA sieving.

[0041] As described above, the concentration of corrosive aerosols can be diluted and reduced, thereby making them suitable for detection and analysis by the analysis module 70. [Simplified Explanation of the Diagram]

[0042] Figure 1 is a partial structural cross-sectional view of one embodiment of the aerosol dilution module of this application. Figure 2 is a system block diagram of one embodiment of the aerosol dilution module of this application. Figure 3 is a schematic diagram of one embodiment of the aerosol dilution module of this application applied to a liquid particle detection system. Figure 4 is a system schematic diagram of one embodiment of the aerosol dilution module of this application applied to a liquid particle detection system.

Claims

1. An aerosol dilution module, comprising: an atomizing component, comprising: an atomizing chamber, including an atomizing space and a first opening, a second opening, a third opening and a fourth opening communicating with the atomizing space, wherein in a height direction, the third opening is higher than the fourth opening, and the first opening is located between the third opening and the fourth opening; a first gas input unit connected to the first opening for inputting a first clean and dry air; and a test liquid supply unit connected to the second opening; a dilution component, comprising: a dilution chamber connected to the third opening; and a second gas input unit connected to the dilution chamber for inputting a second clean and dry air; and a discharge component connected to the dilution chamber for discharging a redundant aerosol; An output component connected to the emission component for receiving a third aerosol; and a controller connected to the atomizing component, the dilution component, the emission component, and the output component. The controller controls the atomizing component to atomize a test liquid into a first aerosol. A portion of the first aerosol enters the dilution chamber through the third opening, and the remaining portion of the first aerosol forms an aerosol condensate and is output through the fourth opening. The controller controls the flow rates of the first clean dry air, the second clean dry air, and the redundant aerosol based on the dilution rate and flow rate of the third aerosol relative to the first aerosol.

2. The aerosol dilution module as described in claim 1, wherein the first gas input unit includes a first gas storage tank and a first gas flow controller, and the first gas flow controller outputs the first clean and dry air from the first gas storage tank into the atomization space according to the control of the controller.

3. The aerosol dilution module as claimed in claim 1, wherein the second gas input unit includes a second gas storage tank and a second gas flow controller, wherein the second gas flow controller outputs the second clean and dry air from the second gas storage tank into the dilution chamber according to the control of the controller.

4. The aerosol dilution module as described in claim 1, wherein the flow rate of the second clean dry air is less than the flow rate of the first clean dry air.

5. The aerosol dilution module as claimed in claim 1, wherein the emission assembly includes an emission pipe, an orifice plate and a vacuum pump, the emission pipe being connected to the dilution chamber, and the vacuum pump drawing redundant aerosol from the emission pipe through the orifice plate according to the control of the controller.

6. The aerosol dilution module as claimed in claim 1, wherein the first clean dry air has a first flow rate, the second clean dry air has a third flow rate, and the controller calculates a second flow rate of the aerosol condensate based on the dilution rate of the third aerosol relative to the first aerosol, wherein the dilution rate of the third aerosol relative to the first aerosol is (first flow rate - second flow rate) ÷ ((first flow rate - second flow rate) + third flow rate).

7. The aerosol dilution module as described in claim 6, wherein the redundant aerosol has a fourth flow rate, the third aerosol has a fifth flow rate, and the controller calculates the fourth flow rate according to the following formula: first flow rate + third flow rate = second flow rate + fourth flow rate + fifth flow rate.

8. The aerosol dilution module as described in claim 5, wherein the test liquid is a highly corrosive liquid, and the dilution chamber and the discharge pipe are made of corrosion-resistant material.

9. The aerosol dilution module as claimed in claim 5, wherein the dilution chamber and the discharge pipe are made of an electrically conductive material.

10. A liquid particle detection system, comprising: an aerosol dilution module as described in any one of claims 1 to 9; an aerosol dryer connected to the controller and an output component of the aerosol dilution module; an electrostatic neutralizer connected to the controller and the aerosol dryer; a particle separator connected to the controller and the electrostatic neutralizer; and a counter connected to the controller and the particle separator; wherein, The controller controls the aerosol dilution module to output the third aerosol; the controller controls the aerosol dryer to heat and dry the third aerosol; the controller controls the electrostatic neutralizer to neutralize the third aerosol; the controller controls the particle separator to generate a flow field and apply an electric field to the third aerosol, so that multiple particles in the third aerosol are separated according to their particle size; the controller controls the counter to agglomerate and amplify the separated particles, calculate the number of particles, and output a count information.

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