Holding device for a disc-shaped component for x-ray inspection and method for clamping the component to a holding device

TW202634246APending Publication Date: 2026-08-16COMET YXLON GMBH
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Patent Information

Application Number
TW114141092
Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
Priority Date
2024-10-25
Filing Date
2025-10-23
Publication Date
2026-08-16

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    Figure TWG2TA001072829_003
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Abstract

each of which exerts a force in the direction of the center of the component in the plane thereof, and in which access to the component is enabled for the X-ray tube on one side of the component and which allows for a free space on the other side of the component for the beam cone of the X-ray tube. Furthermore, the invention relates to a method for clamping a disc-shaped component, in particular a wafer
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