Nanostructure-based high-performance radical and cation measurement device and method of manufacturing the same

Abstract

A nanostructure-based high-performance radical and cation measurement device, comprising: a sensing electrode formed on a substrate; a nanostructure sensing layer formed on the substrate on which the sensing electrode is formed, the nanostructure sensing layer being configured to sense radicals and cations based on an electrical signal generated by adsorption and desorption of the radicals and cations; and a packaging having at least one through-hole and configured to enclose the substrate on which the sensing electrode and the nanostructure sensing layer are formed.

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