Contact probes, probe heads, probe cards and probe systems

Abstract

A contact probe includes a probe body, a through groove, a first locking portion, and an insulating layer. The probe body extends longitudinally and includes a tip and a tail located at opposite ends along the longitudinal direction, and a first side and a second side located at opposite ends in a first transverse direction. The through groove penetrates the probe body in a second transverse direction and extends longitudinally. The first locking portion protrudes only from the first side along the first transverse direction and is located at the tail of the probe body. The insulating layer, being a metal oxide, is disposed on an outer surface of the first locking portion. This reduces the thickness and width of the contact probe at the first locking portion, prevents electrical errors caused by contact during operation, and improves the overall durability and reliability of the structure.

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