Manufacturing methods for micro microscope systems, laser processing equipment, monitoring devices, and electronic components

Abstract

The purpose of this invention is to achieve near-scanning electron microscope resolution using an optical microscope. The micromicroscope system of this invention includes: an objective lens that collects light from a sample; and an image sensor that captures an image of the light collected by the objective lens; wherein the pixel size of the image sensor is in the range of 1 μm to 4 μm, and the resolution of the microlens of the image sensor is in the range of 1.20 times to 2.20 times that of the objective lens.

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