Detection apparatus having stacked light sources and light source device

Abstract

The present invention provides a detection apparatus having a stacked light sources and a light source device. The light source device is provided for detecting a mirror surface and solder balls of a device under test (DUT). The light source device includes a plurality of annular light source modules and a coaxial light source, which are arranged along a height direction. Each of the annular light source modules includes a reflection shield and a light emitting unit that is arranged adjacent to a bottom of the reflection shield. The light emitting unit is configured to emit light toward the reflection shield so as to enable the light to be reflected toward the DUT. One of the annular light source modules adjacent to the coaxial light source is configured to emit a scattered light of high angle, and another one of the annular light source modules away from the coaxial light source is configured to emit a scattered light of low angle. The coaxial light source is configured to emit a coaxial light that travels toward the DUT by passing through the reflection shields of the annular light source modules.

Claims

1. A light source stacking inspection device for performing mirror inspection and solder ball inspection on an object to be tested, the light source stacking inspection device comprising: A first annular light source module is disposed at a predetermined distance above the object under test along a height direction; wherein the first annular light source module includes: a first reflector facing the object under test; wherein the first reflector is hollow truncated cone in shape and its cross-section perpendicular to the height direction is polygonal, and a first top opening is formed at the top of the first reflector; and a first light-emitting unit disposed adjacent to the bottom of the first reflector, and the first light-emitting unit can emit a first light towards the first reflector to form a low-angle diffused light by reflection of the first reflector towards the object under test; at least one second annular light source module is disposed above the first annular light source module along the height direction; wherein the at least one second annular light source module includes: A second reflector facing the first top opening; wherein the second reflector is a hollow truncated cone with a polygonal cross-section perpendicular to the height direction, and a second top opening is formed at the top of the second reflector; and a second light-emitting unit disposed adjacent to the bottom of the second reflector, and the second light-emitting unit can emit a second light towards the second reflector to form a high-angle diffused light by reflection of the second reflector towards the object under test; an external coaxial light source disposed adjacent to the second top opening, and the external coaxial light source can emit a coaxial light that passes through the second reflector and the first reflector towards the object under test; and a camera module disposed above the external coaxial light source along the height direction; wherein the camera module can be used to capture the light reflected from the object under test in the mirror inspection operation or the solder ball inspection operation to form an inspection image; The first reflector has multiple first reflective surfaces and multiple first arc edges, and any two adjacent first reflective surfaces are connected by a first arc edge; the second reflector has multiple second reflective surfaces and multiple second arc edges, and any two adjacent second reflective surfaces are connected by a second arc edge, and the multiple first arc edges overlap the multiple second arc edges along the height direction.

2. The light source stacking detection device as described in claim 1, wherein, Each of the first reflective surfaces forms a first angle with a horizontal plane perpendicular to the height direction, and each of the second reflective surfaces forms a second angle with the horizontal plane; wherein the first angle is less than 80 degrees and the second angle is less than 80 degrees.

3. The light source stacking detection device as described in claim 2, wherein, The angle of the first included angle is greater than or equal to the angle of the second included angle.

4. The light source stacking detection device as described in claim 2, wherein, The angle of the first included angle is less than or equal to the angle of the second included angle.

5. The light source stacking detection device as described in claim 1, wherein, The plurality of first reflective surfaces include a plurality of first primary reflective surfaces and a plurality of first secondary reflective surfaces, and each of the opposite two sides of each first primary reflective surface is connected to a first secondary reflective surface by a first arc ridge.

6. The light source stacking detection device as described in claim 1, wherein, The detection image is formed by the camera module receiving the high-angle diffused light reflected from the object under test and the coaxial light.

7. The light source stacking detection device as described in claim 1, wherein, The detection image is formed by the camera module receiving the low-angle diffused light, the high-angle diffused light, and the coaxial light reflected from the object under test.

8. The light source stacking detection device as described in claim 7, wherein, The detection image includes: a central detection area formed by the camera module receiving coaxial light reflected from the object under test; an inner ring detection area surrounding the central detection area and formed by the camera module receiving high-angle diffused light reflected from the object under test; and an outer ring detection area surrounding the inner ring detection area and formed by the camera module receiving low-angle diffused light reflected from the object under test; wherein no gap is formed between any two adjacent areas of the central detection area, the inner ring detection area, and the outer ring detection area.

9. A light source apparatus for performing mirror inspection and solder ball inspection on an object to be tested, the light source apparatus comprising: A first annular light source module is disposed at a predetermined distance above the object under test along a height direction; wherein the first annular light source module includes: a first reflector facing the object under test; wherein the first reflector is hollow and truncated cone-shaped, and a first top opening is formed at the top of the first reflector; and a first light-emitting unit disposed adjacent to the bottom of the first reflector, and the first light-emitting unit can emit a first light towards the first reflector to form a low-angle diffused light by reflection of the first reflector towards the object under test; at least one second annular light source module is disposed above the first annular light source module along the height direction; wherein the at least one second annular light source module includes: A second reflector facing the first top opening; wherein the second reflector is hollow and truncated cone-shaped, and a second top opening is formed at the top of the second reflector; and a second light-emitting unit disposed adjacent to the bottom of the second reflector, and the second light-emitting unit can emit a second light towards the second reflector to form a high-angle diffused light by reflection of the second reflector towards the object under test; and an external coaxial light source disposed adjacent to the second top opening, and the external coaxial light source can emit a coaxial light that passes through the second reflector and the first reflector towards the object under test; wherein the first reflector has a plurality of first reflective surfaces and a plurality of first arcuate ridges, and any two adjacent first reflective surfaces are connected by a first arcuate ridge; wherein the second reflector has a plurality of second reflective surfaces and a plurality of second arcuate ridges, and any two adjacent second reflective surfaces are connected by a second arcuate ridge, and the plurality of first arcuate ridges overlap the plurality of second arcuate ridges along the height direction.

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