Pellicle film attachment device and pellicle film attachment method, and pellicle film transfer apparatus and pellicle film transfer method
TW202634355APending Publication Date: 2026-08-16LINTEC CORP
View PDF 0 Cites 0 Cited by
Patent Information
- Application Number
- TW114143200
- Authority / Receiving Office
- TW · TW
- Patent Type
- Applications
- Current Assignee / Owner
- Priority Date
- 2024-11-07
- Filing Date
- 2025-11-06
- Publication Date
- 2026-08-16
Smart Images
Figure 00000000_0000_ABST
Abstract
A pellicle film attachment device includes: an affinity improvement treatment unit configured to perform, on an adherend surface of a first frame member, an affinity improvement treatment to improve an affinity for a liquid; a liquid adhesion unit configured to cause the liquid to adhere to the adherend surface having been subjected to the affinity improvement treatment; and an attachment unit configured to attach a pellicle film to the adherend surface to which the liquid adheres.
Need to check novelty before this filing date? Find Prior Art