Spraying equipment and substrate processing equipment

Abstract

This application discloses a spraying device and a substrate processing apparatus. The spraying device includes a body and a switching element. The body has an internal cavity and also has an inlet and an outlet. The inlet is used to introduce at least two chemical solutions into the cavity; the outlet is used to discharge a mixture of at least two chemical solutions from the cavity. The switching element includes an inner core, which is movably disposed in the cavity to open or close the outlet. When the outlet is closed, at least two chemical solutions are introduced into the cavity through the inlet to mix and form a mixture. When the mixing time of the mixture reaches a predetermined time, the inner core opens the outlet to discharge the mixture. The spraying device of this application enables the mixture to mix within the cavity of the spraying device body for a predetermined time, so as to achieve a better substrate processing effect when supplied to the substrate surface.

Images