Method of monitoring states of a plurality of processing cycles in a process chamber

Abstract

The present disclosure discloses a method of monitoring states of a plurality of processing cycles in a process chamber. The method include: obtaining a reference S parameter data set from the process chamber prepared in a reference state; obtaining a plurality of S parameter data sets from the process chamber during a reference processing cycle and comparing the plurality of S parameter data sets with the reference S parameter data set to calculate a plurality of reference similarity values and plotting the plurality of reference similarity values to generate a reference similarity graph; obtaining a plurality of first S parameter data sets from the process chamber during a first processing cycle and comparing the plurality of first S parameter data sets with the reference S parameter data set to calculate a plurality of first similarity values and plotting the plurality of first similarity values to generate a first similarity graph; comparing the first similarity graph with the reference similarity graph to generate a first comparing result; and determining whether the state of the first processing cycle is normal or abnormal based on the first comparing result.

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