Out-coupling techniques for accelerator-based light sources in semiconductor metrology and inspection applications
TW202634628APending Publication Date: 2026-08-16YTOOLS INC
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Patent Information
- Application Number
- TW114127083
- Authority / Receiving Office
- TW · TW
- Patent Type
- Applications
- Current Assignee / Owner
- Priority Date
- 2025-02-07
- Filing Date
- 2025-07-17
- Publication Date
- 2026-08-16
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Abstract
Out-coupling techniques for an accelerator-based EUV / SXR light source. One or more optics are designed to "pick off" and redirect one or more portions of the source light beam, namely, specified harmonics, for use in semiconductor metrology and inspection applications.
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