Utilizing fuses and computer-controllable relays for power distribution on substrate processing tools
TW202634647APending Publication Date: 2026-08-16LAM RES CORP
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Patent Information
- Application Number
- TW114138174
- Authority / Receiving Office
- TW · TW
- Patent Type
- Applications
- Current Assignee / Owner
- Priority Date
- 2024-10-10
- Filing Date
- 2025-10-02
- Publication Date
- 2026-08-16
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Abstract
One example provides a power box for a substrate processing tool. The power box comprises a first distribution branch and a second distribution branch. The first distribution branch has a first fuse and a first computer-controllable relay connected in series. The second distribution branch has a second fuse and a second computer-controllable relay connected in series.
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