Image sensor including air grid and method of forming

Abstract

Disclosed herein are approaches for forming an air grid of an image sensor. One method of forming an image sensor may include forming a plurality of trenches through an oxide layer and a capping layer, and expanding a width of each trench of the plurality of trenches by removing a portion of the oxide layer beneath the capping layer. The method may further include depositing a fill material within the plurality of trenches to form a grid including a plurality of grid structures, the plurality of grid structures each having a void within the fill material.

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