Membrane for workpiece processing and processing method for workpiece

Abstract

Problem: To provide a workpiece processing membrane and a workpiece processing method, which maintains the cleanliness of the attachment surface and preserves the workpiece during workpiece processing by adhering the membrane to the workpiece. Solution: A workpiece processing membrane is a substrate-free double-sided adhesive membrane. A workpiece processing membrane with dimensions of 80mm × 100mm is immersed in 15g of toluene at 25°C for 24 hours. 10μL of the toluene solvent is analyzed by gel permeation chromatography. The results are plotted as a chromatogram, where the vertical axis represents the detection voltage and the horizontal axis represents the dissolution time from the introduction of the toluene solvent to dissolution through the column. The peak area of ​​the detected component is calculated to be less than 4000mV / second, representing the dissolution time from the time taken for a standard polystyrene with a converted average molecular weight of 2.5 million to the time taken for a standard polystyrene with a converted average molecular weight of 200.

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