Substrate processing device

Abstract

This invention provides a substrate processing apparatus that can rapidly transport surface-treated substrates to a cleaning module. The substrate processing apparatus includes: processing units 101 and 102 for processing substrates; and a relay transport device 6 for transporting substrates between processing units 101 and 102. Processing units 101 and 102 each include: surface treatment modules 1A and 1B; cleaning modules 7 and 8; a drying module 11; a substrate transport device 14 extending from one side of each processing unit to the opposite side; and a processing transport device 5 for transporting substrates from the substrate transport device 14 to the surface treatment modules 1A and 1B, and from the surface treatment modules 1A and 1B to the cleaning modules 7 and 8.

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