Substrate supporting module and substrate processing apparatus

Abstract

The present invention relates to a substrate support for depositing thin films on a substrate, comprising: a substrate support portion having a plurality of recessed pocket portions formed thereon for mounting the substrate in a circumferential direction thereon, and a drive gas supply portion for supplying drive gas to the upper part of the pocket portions; and satellites having substrate mounting portions formed thereon for mounting the substrate, and being disposed in each pocket portion, rotating and floating within the pocket portions based on the drive gas, wherein at least a portion of the satellites forms a hollow portion. none

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