Substrate processing apparatus

Abstract

A substrate transport apparatus includes a sealed chamber, a SCARA, and a distributed drive section. The SCARA arm has a fixed joint in the sealed chamber defining a fixed axis of rotation about which the at least three link SCARA arm rotates as a unit. The distributed drive section has drive motors distributed along the SCARA arm. Each of the drive motors of the drive section describe each degree of freedom of kinematic motion of the SCARA arm moving a substrate holding station of the SCARA arm through each substrate transport opening in at least one end and each side of the sealed chamber. Each drive motor is included inside the sealed chamber so that the distribute drive section is wholly included inside the sealed chamber between the top and bottom of the sealed chamber.

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