Processing apparatus, substrate processing apparatus, display method, manufacturing method and process of semiconductor device

Abstract

It includes: a display unit capable of displaying an editing screen, which displays multiple setting values ​​set at the intersection of the multiple items and the multiple steps in a table format that defines the conditions of the processing substrate for each of the multiple steps, using the axes of the aforementioned steps and the axes of the multiple items constituting the aforementioned conditions; and a control unit capable of controlling the aforementioned display unit to change the display order of the multiple items according to the priority set for each of the multiple items, and displaying the aforementioned editing screen in the changed display order.

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