Substrate processing apparatus and cover opening and closing method

Abstract

A technology is provided that enables a cover to be driven with low power consumption. A substrate processing apparatus of the present disclosure includes: a chamber having an opening at its lower part; a cover movable between a closed position (closing the opening) and an open position (opening the opening); a sealing member disposed around the opening in the gap between the cover and the chamber in the closed position; an adsorption plate disposed on the cover and comprising a magnetic material; and a magnet disposed in the chamber that attracts the adsorption plate.

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