Substrate transport system and transport method

Abstract

A technology is provided in a semiconductor manufacturing apparatus to transport a heavier object, such as a cover ring, along the substrate using a moving body configured to magnetically levitate and transport a substrate, while suppressing an increase in floor space. A substrate transport system, configured in a semiconductor manufacturing apparatus for processing substrates, is used to transport the substrate in a transport space. It includes: a substrate transport chamber comprising a plurality of electromagnets for generating a magnetic field on a travel surface; a moving body having a magnet for levitation from the travel surface by the magnetic field, configured to move along the travel surface while holding the substrate; and an auxiliary moving body having a magnet for levitation from the travel surface by the magnetic field, configured to contact the moving body while assisting in the levitation of the moving body and moving along the travel surface when the moving body is holding a heavier object along the travel surface.

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