Wafer processing equipment

Abstract

To provide a semiconductor device manufacturing system and a semiconductor device manufacturing method that improves processing yield, the system comprises: a semiconductor device manufacturing apparatus for processing wafers, comprising: a wafer platform on which the wafer is mounted; and a plurality of heaters disposed inside the wafer platform and below a plurality of regions thereon; a controller for adjusting the output of a plurality of heater power supplies supplied to the plurality of heaters; and a wafer temperature calculation system for determining whether a first output value of the plurality of heater power supplies, pre-calculated to achieve a target temperature in the wafer processing, is within an allowable range, and if it is outside the allowable range, calculating a second output value that corrects all of the first output values ​​to values ​​within the allowable range.

Images