Information processing methods, computer programs and information processing devices

TW202635116APending Publication Date: 2026-08-16TOKYO ELECTRON LTD
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Patent Information

Application Number
TW114144637
Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
Priority Date
2024-11-29
Filing Date
2025-11-17
Publication Date
2026-08-16

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Abstract

This invention provides an information processing method, computer program, and information processing apparatus that can accurately detect similar objects from a plurality of non-temporally sequenced image data obtained from substrate processing. The information processing method of this embodiment comprises an information processing apparatus equipped with a time-series segmentation model that sequentially accepts time-series image data as input and sequentially outputs detection results of the regions where objects are captured in each image data. The apparatus acquires a plurality of non-temporally sequenced image data obtained from photographing objects in substrate processing, inputs the acquired image data into the aforementioned time-series segmentation model to obtain detection results, and outputs the acquired detection results.
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