Methods and systems for predicting substrate process emissions chemistry

Abstract

Methods and systems for predicting substrate process emissions chemistry are provided. A process recipe for a process to be performed using one or more manufacturing equipment is provided as an input to an artificial intelligence (AI) model. The AI model is trained to predict emissions characterization data for a respective process based on a given process recipe. Output(s) of the AI model is obtained, where the output(s) indicate emissions characterization data associated with the process. A determination is made of whether the emissions characterization data associated with the process satisfies one or more emission criteria. Upon a determination that the emissions characterization data associated with the process satisfies the one or more emission criteria, one or more operations of the process are performed using the one or more manufacturing equipment in accordance with the process recipe.

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