External air micro-pollutant adsorption and filtration equipment

Abstract

This invention relates to an external air micro-pollutant adsorption and filtration device. It primarily utilizes a combination design of an external air unit, a zeolite rotor adsorption device, an external air conditioning unit (MAU), and a cleanroom. The zeolite rotor adsorption device is equipped with a zeolite rotor, allowing the external air to first pass through the zeolite rotor to filter out micro-pollutants before being sent into the external air conditioning unit (MAU) and then from there to the cleanroom. This significantly reduces the amount of micro-pollutants entering the cleanroom and reduces the filtration burden on the cleanroom's chemical filters, thereby increasing their lifespan.

Description

Technical Field

[0001] This invention relates to an external air micro-pollutant adsorption and filtration device, particularly one that significantly reduces the amount of micro-pollutants entering a cleanroom, reduces the filtration burden on the cleanroom's chemical filters, and increases the lifespan of the cleanroom's chemical filters. It is applicable to places or factories in the semiconductor, electronics, biotechnology, food processing, and precision instrument manufacturing industries. Prior Technology

[0002] Wafer manufacturing requires cleanrooms, and with the evolution of processes, the line diameter has reached the nanometer level. Therefore, in high-end semiconductor wafer fabrication plants, cleanrooms not only need to filter out particulate contaminants but also have long been concerned with the concentration of extremely small gaseous molecular contaminants (AMCs). AMCs include four types of substances: VOCs (volatile organic compounds), acids, alkalis, and dopants. The removal of AMCs is mandatory, so chemical filters are used in cleanrooms to remove them. However, the sources of AMCs are quite diverse, making effective control a crucial issue.

[0003] In addition to the aforementioned gaseous molecular contaminants (AMC), the cleanroom also has another source of micro-contamination: outside air, i.e., the surrounding atmospheric environment. The concentration of volatile organic compounds (VOCs) in outside air is very low, generally less than 1000 ppb, and the total volatile organic compound (TVOC) concentration is also approximately <1000 ppb. This includes gaseous contaminants such as isopropanol, acetone, and toluene. Because the TVOC concentration is low and does not exceed the hazard or tolerable standards set by the WHO or occupational health societies, the harm to human health is relatively small. However, for advanced wafer fabrication processes, it can affect the yield of products manufactured in the cleanroom, especially the yield of processes below 7 nanometers, such as the yield of 3-nanometer or 2-nanometer wafer fabrication processes.

[0004] Therefore, in view of the above-mentioned deficiencies, the inventors aim to provide an external air micro-pollutant adsorption and filtration device that can significantly reduce the effectiveness of micro-pollutants entering the cleanroom, and which can be easily operated and assembled by users. The inventors have devoted themselves to research, design and manufacture the device to provide convenience to users, which is the motivation for the invention. Summary of the Invention

[0005] The main objective of this invention is to provide an external air micro-pollutant adsorption and filtration device. This device primarily utilizes a combination design of an external air unit, a zeolite rotor adsorption unit, an external air conditioning unit (MAU), and a cleanroom. The zeolite rotor adsorption unit is equipped with a zeolite rotor, allowing the external air to first pass through the zeolite rotor to filter out micro-pollutants before being sent into the external air conditioning unit (MAU) and then from there to the cleanroom. This significantly reduces the amount of micro-pollutants entering the cleanroom, reduces the filtration burden on the cleanroom's chemical filters, increases the lifespan of the chemical filters, and ultimately enhances the overall practicality.

[0006] Another objective of this invention is to provide an adsorption and filtration device for micro-pollutants in external air. In a first embodiment of the zeolite rotor adsorption device, a zeolite rotor controller is provided through the zeolite rotor. The zeolite rotor controller can be set to either continuous operation or timed operation. In particular, the zeolite rotor can be used for adsorption and desorption in a continuous operation mode of 24 hours or in a timed operation mode. In addition, a second embodiment of the zeolite rotor adsorption device is that the zeolite rotor is equipped with a zeolite rotor desorption zone controller. The zeolite rotor desorption zone controller is set to either continuous desorption or timed desorption. Specifically, the zeolite rotor desorption zone can be used for continuous desorption for 24 hours or for timed desorption. For example, when the zeolite rotor is running at 1 RPH (speed per hour), that is, it takes one hour for the zeolite rotor to complete one revolution. After one hour of heating and desorption through the heater, the zeolite rotor can be used for 40.9 hours. When the safety factor is set to SF=3.4, 40.9 / 3.4=12 hours, that is, desorption only needs to be performed once every 12 hours. In this way, the energy consumption of desorption is greatly reduced, and the operating electricity cost is saved, thus achieving the goal of effective energy saving and economic benefits, and increasing the overall operability.

[0007] Another objective of this invention is to provide an adsorption and filtration device for external air micro-pollutants. By installing the zeolite rotor adsorption device at the upstream end of the external air conditioning unit (MAU), micro-pollutants in the outside air can be directly filtered out first, and adsorption and desorption are carried out by the zeolite rotor. The zeolite rotor is recyclable, has no consumables, has a long service life, and low maintenance costs, thus saving time and consumables and increasing the overall usability.

[0008] To further understand the features, characteristics, and technical content of this invention, please refer to the following detailed description and accompanying drawings. However, the accompanying drawings are provided for reference and illustration only and are not intended to limit the invention. Simple Explanation of the Diagram

[0009]

[0010] Figure 1 is a schematic diagram of a dual-rotor purification device installed upstream of an outdoor air conditioning unit.

[0011] Figure 2 is a schematic diagram of another embodiment of installing a dual-rotor purification device upstream of an outdoor air conditioning unit. Implementation

[0012] Please refer to Figures 1 and 2, which are schematic diagrams of embodiments of the present invention. The optimal implementation of the external air micro-pollution adsorption and filtration device of the present invention is applicable to places or factories related to the semiconductor field, electronic technology field, biotechnology field, food processing field, and precision instrument manufacturing field. It mainly has the effect of significantly reducing micro-pollution substances entering the cleanroom and can reduce the filtration burden of the chemical filter in the cleanroom, thereby increasing the service life of the chemical filter in the cleanroom.

[0013] The external air micro-pollution adsorption and filtration device of the present invention is mainly a combination design of an outside air 1, a zeolite rotary adsorption device 2, an outside air conditioning unit (MAU) 3 and a clean room 4 (as shown in Figure 1 and Figure 2). The outside air 1 contains at least one or more gases or combinations, mainly a mixture composed of 78.1% nitrogen, 21% oxygen, 0.9% argon and other impurities. The outside air 1 is also commonly known as air.

[0014] The zeolite rotor adsorption device 2 is equipped with a zeolite rotor 10, a heater 11, an air inlet pipe 12, a clean gas delivery pipe 13, a cooling gas inlet pipe 14, a cooling gas delivery pipe 15, a hot gas delivery pipe 16, and a desorption gas output pipe 17 (as shown in Figures 1 and 2). The zeolite rotor 10 is equipped with an adsorption zone 101, a cooling zone 102, and a desorption zone 103. The zeolite rotor 10 is a concentration rotor made of zeolite.

[0015] One end of the air intake pipe 12 is for the outside air 1 to enter, and the other end of the air intake pipe 12 is connected to one side of the adsorption zone 101 of the zeolite rotor 10, so that the air intake pipe 12 can deliver the outside air 1 to one side of the adsorption zone 101 of the zeolite rotor 10. The air intake pipe 12 is equipped with a fan 121 (as shown in Figure 1 and Figure 2) to push and pull the outside air 1 into the adsorption zone 101 of the zeolite rotor 10. One end of the purified gas delivery pipeline 13 is connected to the other side of the adsorption zone 101 of the zeolite rotor 10, and the other end of the purified gas delivery pipeline 13 is connected to the external air conditioning unit (MAU) 3, so that the outside air 1 can be adsorbed by the adsorption zone 101 of the zeolite rotor 10 and then delivered to the external air conditioning unit (MAU) 3 by the purified gas delivery pipeline 13. In addition, the purified gas delivery pipeline 13 is equipped with a fan 131, which can push and pull the adsorbed gas in the zeolite rotor 10 into the external air conditioning unit (MAU) 3 through the fan 131 (as shown in Figures 1 and 2).

[0016] Furthermore, one end of the cooling gas inlet pipe 14 is connected to one side of the cooling zone 102 of the zeolite rotor 10, so that gas can enter the cooling zone 102 of the zeolite rotor 10 for cooling. One end of the cooling gas delivery pipe 15 is connected to the other side of the cooling zone 102 of the zeolite rotor 10, and the other end of the cooling gas delivery pipe 15 is connected to one end of the heater 11 (as shown in Figures 1 and 2), so that the gas entering the cooling zone 102 of the zeolite rotor 10 is delivered to the heater 11 for heating. The heater 11 is any one of an electric heater, an electric heating tube heater, an electric heating element heater, a gas fuel heater, a liquid fuel heater, or a heat exchanger. Furthermore, one end of the hot gas delivery pipe 16 is connected to the other side of the desorption zone 103 of the zeolite rotor 10, and the other end of the hot gas delivery pipe 16 is connected to the other end of the heater 11 (as shown in Figures 1 and 2), so that the high-temperature hot gas heated by the heater 11 can be delivered through the hot gas delivery pipe 16 to the desorption zone 103 of the zeolite rotor 10 for desorption.

[0017] The cooling zone 102 of the aforementioned zeolite rotor 10 has two implementations. In one implementation, the cooling air inlet pipe 14 connected to one side of the cooling zone 102 of the zeolite rotor 10 allows fresh air to enter (as shown in Figure 2), which is used to cool the cooling zone 102 of the zeolite rotor 10. In the second implementation, the inlet pipe 12 is provided with an inlet connecting pipe 122, and the other end of the inlet connecting pipe 122 is connected to the cooling air inlet pipe 14 (as shown in Figure 1), so that the outside air 1 in the inlet pipe 12 can be transported to the cooling zone 102 of the zeolite rotor 10 for cooling. The inlet connecting pipe 122 is provided with an inlet connecting control valve 1221 (as shown in Figure 1) to control the airflow of the inlet connecting pipe 122.

[0018] One end of the desorbed gas output pipe 17 is connected to one side of the desorption zone 103 of the zeolite rotor 10, while the other end of the desorbed gas output pipe 17 is directly connected to the outside air 1 (as shown in Figures 1 and 2), meaning that the desorbed gas is directly discharged to the outside through the desorbed gas output pipe 17 to mix with the outside air 1. Furthermore, the desorbed gas output pipe 17 is equipped with a fan 171 (as shown in Figures 1 and 2) to push and pull the desorbed gas to the outside.

[0019] Furthermore, the external air conditioning unit (MAU) 3 is equipped with an inlet 401 and an outlet 402 (as shown in Figures 1 and 2). The inlet 401 of the external air conditioning unit (MAU) 3 is connected to the other end of the clean air delivery pipeline 13 of the zeolite rotor adsorption device 2, and the cleanroom 4 is connected to the outlet 402 of the external air conditioning unit (MAU) 3, so that the outside air 1 can first pass through the zeolite rotor 10 of the zeolite rotor adsorption device 2 to filter out the micro-pollutants in the outside air 1, and then be sent into the external air conditioning unit (MAU) 3, and then sent to the cleanroom 4 for use through the external air conditioning unit (MAU) 3.

[0020] The external air conditioning unit (MAU) 3 is equipped with a housing 40, which contains a first filter device 41, a first temperature device 42, a water washing device 43, a second temperature device 44, and a second filter device 45 (as shown in Figures 1 and 2). The housing 40 of the external air conditioning unit (MAU) 3 is equipped with a fan 46, which is located before the second filter device 45. The fan 46 mainly provides airflow so that the gas transported by the clean gas delivery pipeline 13 of the zeolite rotor adsorption device 2 after adsorption can be processed sequentially by the first filter device 41, the first temperature device 42, the water washing device 43, the second temperature device 44, and the second filter device 45, thereby ensuring the efficient operation of the external air conditioning unit (MAU) 3. The at least one first filter device 41 is either a pre-filter or a medium-efficiency filter, or a combination thereof. The pre-filter is mostly plate-shaped and suitable for primary filtration, mainly used to filter dust particles larger than 5μm. Its materials are primarily non-woven fabric, nylon mesh, activated carbon filter media, and metal mesh. The medium-efficiency filter is mostly bag-shaped and widely used for intermediate filtration, mainly used to filter dust particles larger than 1-5μm. Its materials are primarily synthetic fibers and non-woven fabric.

[0021] The first temperature device 42 is either a precooling coil 421 or a preheating coil 422 (as shown in Figure 2). The precooling coil 421 is supplied with either cooling water or ice water to effectively reduce the temperature of the gas after adsorption, which is transported through the clean gas delivery pipeline 13 of the zeolite rotor adsorption device 2. The preheating coil 422 is supplied with either hot water or steam to transfer heat energy to the gas after adsorption, which is transported through the clean gas delivery pipeline 13 of the zeolite rotor adsorption device 2, thereby increasing its temperature. Furthermore, the first temperature device 42 can also be any one or a combination of precooler 423 and preheater 424 (as shown in Figure 1). The precooler 423 is any one of shell-and-tube cooler, finned tube cooler or plate heat exchanger cooler, and the preheater 424 is any one of electric heater, gas heater, heat transfer oil heater or hot water heater.

[0022] The washing equipment 43 is a washing humidifier, mainly composed of at least one pressure pump, at least one nozzle, at least one water supply valve, at least one drain valve, and at least one pipeline (not shown in the figure). When the gas after adsorption is transported through the clean gas delivery pipeline 13 of the zeolite rotor adsorption device 2 and passes through the washing humidifier, the water molecules will fully absorb the heat in the adsorbed gas and vaporize and evaporate, thereby increasing the humidity of the gas after adsorption transported through the clean gas delivery pipeline 13 of the zeolite rotor adsorption device 2 to form a humid gas.

[0023] The second temperature device 44 can be any one or a combination of a recooling coil 441 and a reheating coil 442 (as shown in Figure 2). The recooling coil 441 is supplied with either cooling water or chilled water to effectively reduce the temperature of the adsorbed gas transported through the clean gas transport pipeline 13 of the zeolite rotor adsorption device 2. The reheating coil 442 is supplied with either hot water or steam to transfer heat energy to the adsorbed gas transported through the clean gas transport pipeline 13 of the zeolite rotor adsorption device 2, thereby increasing its temperature. Alternatively, the second temperature device 44 can also be any one or a combination of a recooler 443 and a reheater 444 (as shown in Figure 1). The recooler 443 can be any one of a shell-and-tube cooler, a finned tube cooler, or a plate heat exchanger cooler, and the reheater 444 can be any one of an electric heater, a gas heater, a thermal oil heater, or a hot water heater.

[0024] The second filter device, part of the 45 series, is either a High Efficiency Particulate Air Filter (HEPA) or an Ultra Low Penetration Air Filter (ULPA), or a combination thereof. The HEPA filter is suitable for end-point filtration, achieving an efficiency of 99.998% for particles of 0.1 microns and 0.3 microns, and a removal efficiency of over 99.7% for particles larger than 0.3 microns in diameter (1 / 200th the diameter of a human hair). It is the most effective filtration medium for pollutants such as smoke, dust, and bacteria, and its material is primarily ultra-fine glass fiber paper or composite filter paper. The ULPA filter is mainly used to remove particles larger than 0.12 μm (120 nanometers), with a filtration efficiency of approximately 99.995% or higher (DOP), and its material is primarily special ultra-fine glass fiber paper.

[0025] Furthermore, the concentration of gaseous volatile organic pollutants in the outside air is very low, generally less than 1000 ppb, while the actual IPA concentration in the outside air is only a few tens of ppb. Compared to the volatile organic exhaust gas treatment systems commonly used for air pollution control, the concentration of gaseous volatile organic compounds in semiconductor and electronics factories is mostly between 100 and 800 ppm. Although zeolite rotors are also used in the treatment of this type of gaseous volatile organic compound exhaust gas, the inventors believe that there is a significant difference between the two, with the concentration difference being at least 100 to 1000 times. Therefore, this invention installs the zeolite rotor adsorption device 2 (as shown in Figures 1 and 2) upstream of the outside air conditioning unit (MAU) 3, which can directly filter out micro-pollutants in the outside air 1, and then adsorb and desorb them through the zeolite rotor 10. The zeolite rotor 10 is recyclable, has no consumables, has a long service life, and low maintenance costs, thus saving time and consumables.

[0026] Furthermore, the zeolite rotor adsorption device 2 of the present invention has two implementation methods. In the first implementation method, the zeolite rotor 10 is equipped with a zeolite rotor controller (not shown). The zeolite rotor controller can be set to either continuous operation or timed operation. Specifically, the zeolite rotor 10 can be used for adsorption and desorption in a continuous 24-hour operation mode, or it can be used in a timed operation mode. The zeolite rotor controller can be connected to the heater 11. When the zeolite rotor controller is set to continuous operation or timed operation, the heater 11 can be started simultaneously to heat and output heat to the desorption zone 103. In the timed operation mode, the zeolite rotor 10 stops for a period of time according to the set time before resuming operation to perform adsorption and desorption. The zeolite rotor controller can also turn off the heater 11, allowing the cooling gas supplied by the cooling gas supply pipeline 15 to pass directly through the heater 11 without being heated before being supplied to the desorption zone 103. In addition, in a second embodiment of the zeolite rotor adsorption device 2, the zeolite rotor 10 is equipped with a zeolite rotor desorption zone controller (not shown). The zeolite rotor desorption zone controller is set to either continuous desorption or timed desorption. In particular, the desorption zone 103 of the zeolite rotor 10 can be used for continuous desorption for 24 hours or for timed desorption. The zeolite rotor desorption zone controller can be connected to the heater 11. When the zeolite rotor desorption zone controller is set to continuous desorption or timed desorption, the heater 11 can be started at the same time to heat and output heat to the desorption zone 103. The zeolite rotor desorption zone controller can also shut down the heater 11, so that the cooling gas delivered by the cooling gas delivery pipeline 15 can pass directly through the heater 11 without being heated, and then be delivered to the desorption zone 103. In the case of timed desorption, the desorption zone 103 of the zeolite rotor 10 stops the heater 11 for a period of time according to the time setting, and then continues to heat, so as to facilitate the output of heat source to the desorption zone 103 for desorption.

[0027] In particular, experiments revealed that by creating modules of zeolite blocks with the same thickness as the zeolite rotor (e.g., 400mm), desorbing them for one hour, and then conducting saturated adsorption capacity tests, it was found that adsorption could last for 3.5 hours, even when the adsorption efficiency decreased from 100% to 80%. When the inlet gas condition was IPA 11.69ppm, the experimental results showed that after desorption, the inlet IPA of 11.69ppm could be adsorbed for 210 minutes = 3.5 hours. However, in actual operation, the outside gas IPA is 20~60ppb, and the total volatile organic compounds (TVOC) are <1000ppb. Compared with other common pollutants, such as toluene, outside gas IPA is less easily adsorbed. Therefore, based on the above, we can equivalently infer the adsorption time. We simply calculated the expected adsorption time after regeneration as a = (11.69ppm * 1000ppb / ppm) * 3.5 hours / 1000ppb = 40.9 hours. Therefore, when using heated airflow for desorption (hereinafter referred to as heated desorption), we designed an intermittent heated desorption system. For example, desorption for one hour, followed by 12 hours of use. This means that continuous desorption for 24 hours is not required. Desorption for one hour every 12 hours is sufficient. This operation significantly reduces the energy consumption for desorption.

[0028] The detailed explanation is as follows: Based on the above design, the zeolite blocks are made into modules (e.g., 400mm) and replaced with a honeycomb-shaped zeolite rotor. With a rotation speed of 1RPH, the honeycomb-shaped zeolite rotor takes one hour to complete one revolution. The entire honeycomb-shaped zeolite rotor is heated and desorbed using a heated airflow. After one hour of heated desorption (hereinafter referred to as heated desorption), it can be used for 40.9 hours. For example, if we set the safety factor SF=3.4, 40.9 / 3.4=12 hours, then the design is intermittent heated desorption. After one hour of intermittent heated desorption, the honeycomb-shaped zeolite rotor can be used for 12 hours. A day is 24 hours, which means that continuous 24-hour heated desorption is not required. The unique intermittent heated desorption design of this invention has an advantage: saving on heating electricity costs.

[0029] For example, a honeycomb zeolite rotor with a diameter of 4250mm requires an air volume of 8000 NCMH for desorption. The outlet temperature of the cooling zone is 150℃, which needs to be heated to 220℃. Based on an electricity price of NTD 3.5 / kW-hr, the electricity consumption for continuous heating and desorption for 24 hours is calculated to be 209kW * 24hr = 5,020kW-hr. Then, assuming 360 days of operation per year, the annual operating electricity cost is 5020 * 360 * 3.5 = 6,325,200 yuan / year. The unique design of this invention, using an intermittently heated honeycomb zeolite rotor for desorption, allows for 12 hours of continuous operation after one hour of intermittent heating and desorption, or 24 hours a day. This eliminates the need for continuous 24-hour heating and desorption. For example, a 4250mm diameter honeycomb zeolite rotor requires 8000 NCMH of airflow for desorption, with a cooling zone outlet temperature of 150℃, requiring heating to 220℃. Based on an electricity price of NTD 3.5 / kW-hr, the electricity consumption for heating and desorption in 24 hours is calculated as 209kW * (1 / 12) * 24hr = 418kW-hr. Assuming 360 operating days per year, the annual electricity cost would be 418 * 360 * 3.5 = 526,680 NTD / year. The difference in electricity consumption is significant, with an annual difference in operating costs of NTD 5,798,520. Clearly, this invention offers economic benefits in terms of the difference in annual operating costs.

[0030] Therefore, the present invention mainly utilizes a combined design of an outside air unit 1, a zeolite rotor adsorption device 2, an outside air conditioning unit (MAU) 3, and a cleanroom 4 (as shown in Figures 1 and 2). The zeolite rotor adsorption device 2 is equipped with a zeolite rotor 10, allowing the outside air 1 to first pass through the zeolite rotor 10 of the zeolite rotor adsorption device 2 to filter out micro-pollutants in the outside air, before being sent into the outside air conditioning unit (MAU) 3, and then through the outside air conditioning unit (MAU) 3 to the cleanroom 4 for use. This significantly reduces the amount of micro-pollutants entering the cleanroom 4, reduces the filtration burden on the chemical filters in the cleanroom 4, increases the service life of the chemical filters in the cleanroom 4, and thus increases the overall practicality.

[0031] The above detailed description should make it clear to those skilled in the art that the present invention can indeed achieve the aforementioned objectives and has met the requirements of the Patent Law. Therefore, an invention patent application is hereby filed.

[0032] However, the above description is only a preferred embodiment of the present invention and should not be construed as limiting the scope of the present invention. Therefore, any simple equivalent changes and modifications made in accordance with the scope of the patent application and the contents of the specification of the present invention should still fall within the scope of the patent of the present invention.

[0033]

[0034] 1: Outside Air

[0035] 2: Zeolite Rotary Adsorption Equipment

[0036] 3: External Air Conditioning Unit (MAU)

[0037] 4: Cleanroom

[0038] 10: Zeolite Rotor

[0039] 101: Adsorption Region

[0040] 102: Cooling Zone

[0041] 103: Desorption Zone

[0042] 11: Heater

[0043] 12: Intake pipe

[0044] 121: Fan

[0045] 122: Intake connecting pipe

[0046] 1221: Intake air connection control valve

[0047] 13: Clean air delivery pipeline

[0048] 131: Fan

[0049] 14: Cooling air intake pipe

[0050] 15: Cooling gas delivery pipeline

[0051] 16: Hot gas delivery pipeline

[0052] 17: Desorption gas output pipeline

[0053] 171: Fan

[0054] 40: Box

[0055] 401: Entrance

[0056] 402: Export

[0057] 41: First filter screen equipment

[0058] 42: First temperature equipment

[0059] 421: Precooling coil

[0060] 422: Preheating Coil

[0061] 423: Precooler

[0062] 424: Preheater

[0063] 43: Washing equipment

[0064] 44: Second temperature device

[0065] 441: Recooling coil

[0066] 442: Reheat Coil

[0067] 443: Recooler

[0068] 444: Reheater

[0069] 45: Second filter equipment

[0070] 46: Fan

Claims

1. An adsorption and filtration device for removing micro-pollutants from external air, comprising: An outside air source, comprising at least one or more gases or combinations thereof; a zeolite rotor adsorption device, comprising a zeolite rotor, a heater, an inlet pipe, a purified gas delivery pipe, a cooling gas inlet pipe, a cooling gas delivery pipe, a hot gas delivery pipe, and a desorbed gas outlet pipe, wherein the zeolite rotor comprises an adsorption zone, a cooling zone, and a desorption zone, and one end of the inlet pipe supplies the outside air source. Air enters through the inlet pipe, the other end of which is connected to one side of the adsorption zone of the zeolite rotor. One end of the purified air delivery pipe is connected to the other side of the adsorption zone of the zeolite rotor. One end of the cooling air inlet pipe is connected to one side of the cooling zone of the zeolite rotor. One end of the cooling air delivery pipe is connected to the other side of the cooling zone of the zeolite rotor. The other end of the cooling air delivery pipe is connected to one end of the heater. One end of the hot air delivery pipe is connected to the other side of the desorption zone of the zeolite rotor. The other end of the hot air delivery pipe is connected to the heater. The other end is connected to one side of the desorption zone of the zeolite rotor; an external air conditioning unit (MAU) is provided with a box, an inlet and an outlet. The inlet of the external air conditioning unit (MAU) is connected to the other end of the clean gas delivery pipe of the zeolite rotor adsorption device. The box is equipped with a first filter, a first temperature device, a water washing device, a second temperature device and a second filter; and a clean room is connected to the outlet of the external air conditioning unit (MAU).

2. The air micro-pollutant adsorption and filtration device as described in claim 1, wherein the zeolite rotor is further configured to operate continuously or at timed intervals.

3. The air micro-pollutant adsorption and filtration device as described in claim 1, wherein the desorption zone of the zeolite rotor is further configured as either continuous desorption or timed desorption.

4. The air micro-pollutant adsorption and filtration device as described in claim 1, wherein the first temperature device is further any one or a combination of a precooling coil, a precooler, a preheating coil, and a preheater.

5. The external air micro-pollution adsorption and filtration device as described in claim 1, wherein the second temperature device is further any one or a combination of a recooling coil, a recooler, a reheating coil, and a reheater.

6. The air micro-pollutant adsorption and filtration device as described in claim 1, wherein a fan is further provided inside the housing.

7. The air micro-pollutant adsorption and filtration device as described in claim 1, wherein the heater is further any one of an electric heater, an electric heating tube heater, an electric heating element heater, a gas fuel heater, a liquid fuel heater, and a heat exchanger.

8. The air micro-pollutant adsorption and filtration device as described in claim 1, wherein the air inlet pipe of the zeolite rotor is further provided with a fan.

9. The air micro-pollution adsorption and filtration device as described in claim 1, wherein the air inlet pipeline is further provided with an air inlet connecting pipeline, the air inlet connecting pipeline is connected to the cooling air inlet pipeline, and the air inlet connecting pipeline is further provided with an air inlet connecting control valve to control the air volume of the air inlet connecting pipeline.

10. The external gas micro-pollution adsorption and filtration device as described in claim 1, wherein the other end of the desorbed gas output pipeline is further connected to the external gas.

11. The external gas micro-pollution adsorption and filtration device as described in claim 1, wherein the desorbed gas output pipeline is further provided with a fan.

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