Dual-rotor purification equipment for external air appliances in cleanrooms

Abstract

This invention relates to a dual-rotor purification device for external air in a cleanroom. It primarily utilizes a combination design of an outside air unit, a zeolite rotor adsorption device, an external air conditioning unit (MAU), and a cleanroom. The zeolite rotor adsorption device comprises a first zeolite rotor and a second zeolite rotor. This allows the outside air to first pass through the first and second zeolite rotors of the adsorption device to filter out micro-pollutants before being sent into the external air conditioning unit (MAU) and then from there to the cleanroom. This significantly reduces the amount of micro-pollutants entering the cleanroom and reduces the filtration burden on the cleanroom's chemical filters, thereby increasing their lifespan.

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