Containers, methods of preparing a container, and methods of mixing a liquid slurry in the container
TW202635395APending Publication Date: 2026-09-01ENTEGRIS INC
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Patent Information
- Application Number
- TW114147651
- Authority / Receiving Office
- TW · TW
- Patent Type
- Applications
- Current Assignee / Owner
- Priority Date
- 2024-12-05
- Filing Date
- 2025-12-05
- Publication Date
- 2026-09-01
Smart Images
Figure TWG2TA001074811_001 
Figure TWG2TA001074811_002 
Figure TWG2TA001074811_003
Abstract
Described are containers and methods of mixing a slurry such as a CMP slurry in a container, the container comprising baffles to allow the slurry to be mixed to a uniform distribution within the container, while forming not more than a minimum vortex.
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