Method for manufacturing substrates with micropores
TW202635433APending Publication Date: 2026-09-01MORU
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Patent Information
- Application Number
- TW114151053
- Authority / Receiving Office
- TW · TW
- Patent Type
- Applications
- Current Assignee / Owner
- Priority Date
- 2025-02-20
- Filing Date
- 2025-12-24
- Publication Date
- 2026-09-01
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Abstract
The method for manufacturing a substrate with micropores provided by the present invention is based on TGV forming technology, which includes: performing perforation on the substrate using time-wavelength modulated laser pulses, and performing chemical etching when the diameter of the through hole formed by the above perforation is 1 μm or more.
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