Polishing carrier head with electromagnetic pressure control

Abstract

A carrier head for positioning a substrate on a polishing surface includes a housing, a support comprising multiple channels therethrough, and a plurality of pressure control elements secured within the multiple channels of the support. Each pressure control element includes an electromagnetic actuator, a first flexible membrane secured to the support such that portions of the first flexible membrane extending from each channel to define a balloon at each channel with each balloon defining a chamber such that actuation of the electromagnetic actuator adjusts a gas pressure in the respective chamber, and a pressure sensor arranged within the chamber.

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