Method and apparatus for generating robot motion path

Abstract

A method for generating a motion path for a substrate transport robot according to the present invention displays on a display unit in an identifiable manner the timings in the motion path where a gap between at least one of the robot and workpiece on the motion path and a placement area is smaller than a predetermined distance, based on integrated data obtained by integrating robot CAD data, placement area CAD data, and workpiece CAD data. The integrated data are used to derive the motion path of the substrate transport robot in the placement area where the substrate transport robot and the workpiece are placed.

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